| 7593093 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +9 more |
2009-09-22 |
| 7593096 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens |
2009-09-22 |
| 7589818 |
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus |
Johannes Catharinus Hubertus Mulkens, Marinus Aart Van Den Brink |
2009-09-15 |
| 7576831 |
Method and apparatus for maintaining a machine part |
Pieter Johannes Marius Van Groos, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen +2 more |
2009-08-18 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Paulus Martinus Maria Liebregts, Menno Fien, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +3 more |
2009-07-14 |
| 7554105 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Pertrus Bartray, Marc Wilhelmus Maria Van Der Wijst, Michael Jozef Mathijs Renkens, Gerard Van Schothorst +1 more |
2009-06-30 |
| 7545481 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu +3 more |
2009-06-09 |
| 7542127 |
Lithographic apparatus and method for manufacturing a device |
Timotheus Franciscus Sengers, Nicolaas Antonius Allegondus Johannes Van Asten, Wilhelmus Josephus Box, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier +6 more |
2009-06-02 |
| 7532304 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Bernard Gellrich, Andreas Wurmbrand |
2009-05-12 |
| 7528965 |
Lithographic apparatus and method for calibrating the same |
Leon Martin Levasier, Rene Oesterholt |
2009-05-05 |
| 7528929 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2009-05-05 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine, Vladimir Vital'evitch Ivanov, Erik René Kieft, Lucas Henricus Johannes Stevens +5 more |
2009-05-05 |
| 7525640 |
Lithographic apparatus and device manufacturing method |
Bastiaan Stephanus Hendricus Jansen, Marius Ravensbergen, Markus Hauf |
2009-04-28 |
| 7523701 |
Imprint lithography method and apparatus |
Aleksey Yurievich Kolesnychenko, Helmar Van Santen |
2009-04-28 |
| 7522261 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrickus Antonius Leenders, Bob Streefkerk +3 more |
2009-04-21 |
| 7515281 |
Lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch |
2009-04-07 |
| 7492443 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Hans Meiling, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders |
2009-02-17 |
| 7483120 |
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Henrikus Herman Marie Cox, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot |
2009-01-27 |
| 7482611 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more |
2009-01-27 |
| 7459808 |
Lithographic apparatus and motor |
Sven Antoin Johan Hol, Angelo Cesar Peter De Klerk, Fransicus Mathijs Jacobs, Mark Scholten, Arjan Franklin Bakker |
2008-12-02 |
| 7459690 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan +1 more |
2008-12-02 |
| 7446849 |
Lithographic apparatus and device manufacturing method |
Tjarko Adriaan Rudolf Van Empel, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernard Gellrich, Bauke Jansen +1 more |
2008-11-04 |
| 7436484 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Dominicus Jacobus Petrus Adrianus Franken, Marius Ravensbergen |
2008-10-14 |
| 7433015 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Paul Graupner, Bob Streefkerk |
2008-10-07 |
| 7423730 |
Lithographic apparatus |
Gerard Van Schothorst, Fransiscus Hendrikus Van Deuren, Jan Van Eijk, Robert-Han Munnig Schmidt, Felix Godfried Peter Peeters |
2008-09-09 |