| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2020-05-12 |
| 10620544 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Michel Riepen, Fabrizio Evangelista |
2020-04-14 |
| 10488759 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2019-11-26 |
| 10451973 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2019-10-22 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2019-04-23 |
| 10209624 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Michel Riepen, Fabrizio Evangelista |
2019-02-19 |
| 9846372 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Michel Riepen, Fabrizio Evangelista |
2017-12-19 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2017-05-09 |
| 9477153 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2016-10-25 |
| 9465302 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2016-10-11 |
| 9256136 |
Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply |
Rogier Hendrikus Magdalena Cortie, Michel Riepen, Fabrizio Evangelista |
2016-02-09 |
| 9036127 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2015-05-19 |
| 8860924 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2014-10-14 |
| 8823919 |
Lithographic apparatus, removable member and device manufacturing method |
Nina Vladimirovna Dziomkina, Roelof Frederik De Graaf, Marcus Adrianus Van De Kerkhof, Martinus Hendrikus Antonius Leenders, Gerardus Martinus Antonius De Rooij +4 more |
2014-09-02 |
| 8780321 |
Lithographic apparatus and device manufacturing method |
Thijs Egidius Johannes Knaapen, Richard Joseph Bruls, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Martijn Hendrik Kamphuis +10 more |
2014-07-15 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-03-25 |
| 8675173 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk |
2014-03-18 |
| 8659741 |
Lithographic apparatus, removable member and device manufacturing method |
Roelof Frederik De Graaf, Marcus Adrianus Van De Kerkhof, Martinus Hendrikus Antonius Leenders, Gerardus Martinus Antonius De Rooij, Martijn Houben +4 more |
2014-02-25 |
| 8634058 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit |
2014-01-21 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-01-21 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2013-06-25 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +16 more |
2013-03-26 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Nicolaas Rudolf Kemper, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Danny Maria Hubertus Philips +5 more |
2012-09-04 |
| 8248577 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2012-08-21 |
| 8218126 |
Lithographic apparatus and device manufacturing method |
Koen Steffens, Ronald Van Der Ham, Daniel Jozef Maria Direcks, Gert-Jan Gerardus Johannes Thomas Brands |
2012-07-10 |