| 11143968 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen +2 more |
2021-10-12 |
| 10649341 |
Lithographic apparatus |
Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2020-05-12 |
| 9618835 |
Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure |
Daniel Jozef Maria Direcks, Erik Henricus Egidius Catharina Eummelen, Maikel Adrianus Cornelis Schepers, Sergei Shulepov, Pieter Mulder +2 more |
2017-04-11 |
| 9465302 |
Lithographic apparatus |
Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2016-10-11 |
| 9383654 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen +2 more |
2016-07-05 |
| 9036127 |
Lithographic apparatus |
Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2015-05-19 |
| 8638417 |
Fluid handling structure, lithographic apparatus and a device manufacturing method |
Danny Maria Hubertus Philips, Daniel Jozef Maria Direcks, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens, Marcus Johannes Van Der Zanden +1 more |
2014-01-28 |
| 8508712 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Danny Maria Hubertus Philips, Koen Steffens, Tijmen Wilfred Mathijs Gunther, David Bessems |
2013-08-13 |
| 8421993 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens, Koen Steffens +1 more |
2013-04-16 |
| 8351018 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Koen Steffens, Arnold Jan Van Putten |
2013-01-08 |