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Substrate table, immersion lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems |
2025-01-14 |
| 12117721 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk |
2024-10-15 |
| 11537038 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk |
2022-12-27 |
| 11215933 |
Substrate table, immersion lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems |
2022-01-04 |
| RE48676 |
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method |
Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre |
2021-08-10 |
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Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre |
2020-12-22 |
| 10866501 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk |
2020-12-15 |
| 10802410 |
Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid |
Nicolaas Rudolf Kemper, Marcel Beckers, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink |
2020-10-13 |
| 10451980 |
Substrate table, immersion lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems |
2019-10-22 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2019-07-09 |
| RE47237 |
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method |
Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre |
2019-02-12 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2018-04-24 |
| 9927715 |
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre |
2018-03-27 |
| 9766556 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate |
2017-09-19 |
| 9625833 |
Substrate table, immersion lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Koen Steffens, Mathieus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems |
2017-04-18 |
| 9618835 |
Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure |
Daniel Jozef Maria Direcks, Erik Henricus Egidius Catharina Eummelen, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Pieter Mulder +2 more |
2017-04-11 |
| 9477158 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Marcel Beckers, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink |
2016-10-25 |
| 9448494 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate |
2016-09-20 |
| 9235113 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk |
2016-01-12 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9099501 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate |
2015-08-04 |
| 9059228 |
Substrate table, immersion lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems |
2015-06-16 |
| 8767169 |
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method |
Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre |
2014-07-01 |
| 8711326 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ronald Van Der Ham, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Richard Moerman, Michel Riepen +8 more |
2014-04-29 |
