| RE50571 |
Lithographic apparatus, device manufacturing method, and method of correcting a mask |
— |
2025-09-02 |
| 12067340 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Arie Jeffrey Den Boef, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2024-08-20 |
| 11875966 |
Method and apparatus for inspection |
Bernardo Kastrup, Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop, Erwin Paul SMAKMAN, Tamara Druzhinina +1 more |
2024-01-16 |
| 11860548 |
Method for characterizing a manufacturing process of semiconductor devices |
Wim Tjibbo Tel, Hermanus Adrianus DILLEN, Marc Jurian Kea, Mark John Maslow, Koen Thuijs +3 more |
2024-01-02 |
| 11609504 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate |
2023-03-21 |
| 11094502 |
Method and apparatus for inspection |
Bernardo Kastrup, Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop, Erwin Paul SMAKMAN, Tamara Druzhinina +1 more |
2021-08-17 |
| 11080459 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Arie Jeffrey Den Boef, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2021-08-03 |
| 11048174 |
Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program |
Michael Kubis, Marinus Jochemsen, Richard S. Wise, Nader Shamma, Girish Dixit +3 more |
2021-06-29 |
| 10962891 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +15 more |
2021-03-30 |
| 10915689 |
Method and apparatus to correct for patterning process error |
Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen +5 more |
2021-02-09 |
| 10866530 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate |
2020-12-15 |
| 10788755 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2020-09-29 |
| 10761438 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra |
2020-09-01 |
| 10739684 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens |
2020-08-11 |
| 10705432 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2020-07-07 |
| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Erik Henricus Egidius Catharina Eummelen +7 more |
2020-05-12 |
| 10579772 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Arie Jeffrey Den Boef, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2020-03-03 |
| 10527955 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2020-01-07 |
| 10509326 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2019-12-17 |
| 10503084 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +15 more |
2019-12-10 |
| 10495981 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2019-12-03 |
| 10495980 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2019-12-03 |
| 10466595 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2019-11-05 |
| 10345712 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2019-07-09 |
| 10338478 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens |
2019-07-02 |
