Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124179 | Method of wafer alignment using at resolution metrology on product features | Wim Tjibbo Tel, Hermanus Adrianus DILLEN, Roy Werkman, Weitian Kou | 2024-10-22 |
| 11860548 | Method for characterizing a manufacturing process of semiconductor devices | Wim Tjibbo Tel, Hermanus Adrianus DILLEN, Mark John Maslow, Koen Thuijs, Peter David Engblom +3 more | 2024-01-02 |
| 11403453 | Defect prediction | Lin Lee Cheong, Bruno La Fontaine, Yasri Yudhistira, Maxime Philippe Frederic Genin | 2022-08-02 |
| 11392044 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Chi-Hsiang Fan, Hakki Ergün Cekli +3 more | 2022-07-19 |
| 11143971 | Control based on probability density function of parameter | Wim Tjibbo Tel, Roy ANUNCIADO | 2021-10-12 |
| 10578980 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Chi-Hsiang Fan, Hakki Ergün Cekli +3 more | 2020-03-03 |
| 9958790 | Inspection methods, substrates having metrology targets, lithographic system and device manufacturing method | Tjitte Nooitgedagt | 2018-05-01 |
| 9715181 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Paul Frank Luehrmann, Wolfgang Henke | 2017-07-25 |
| 9507279 | Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Paul Frank Luehrmann, Eduardus Johannes Gerardus Boon, Daan Maurits Slotboom, Jean-Philippe Xavier Van Damme +2 more | 2016-11-29 |