Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525786 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2022-12-13 |
| 10955353 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2021-03-23 |
| 10241055 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2019-03-26 |
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Emil Peter Schmitt-Weaver, Wolfgang Henke, Thomas Leo Maria Hoogenboom, Pavel Izikson, Daan Maurits Slotboom +2 more | 2018-05-15 |
| 9715181 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Wolfgang Henke, Marc Jurian Kea | 2017-07-25 |
| 9507279 | Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Eduardus Johannes Gerardus Boon, Daan Maurits Slotboom, Jean-Philippe Xavier Van Damme, Wolfgang Henke +2 more | 2016-11-29 |
| 8760662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2014-06-24 |
| 8553230 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2013-10-08 |
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2011-11-08 |
| 7791732 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2010-09-07 |
| 7679715 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Stefan Geerte Kruijswijk, Rard Willem De Leeuw, Wim Tjibbo Tel, Paul Jacques Van Wijnen, Kars Zeger Troost | 2010-03-16 |
| 7403259 | Lithographic processing cell, lithographic apparatus, track and device manufacturing method | Stefan Geerte Kruijswijk, Rard Willem De Leeuw, Wim Tjibbo Tel, Paul Jacques Van Wijnen, Kars Zeger Troost | 2008-07-22 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Richard Johannes Franciscus Van Haren +7 more | 2006-09-26 |