Issued Patents All Time
Showing 1–25 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429328 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2025-09-30 |
| 12411421 | Metrology apparatus based on high harmonic generation and associated method | Peter Michael KRAUS, Sylvianne Dorothea Christina ROSCAM ABBING, Filippo CAMPI, ZhuangYan ZHANG, Petrus Wilhelmus SMORENBURG +2 more | 2025-09-09 |
| 12399434 | Method of determining a characteristic of a structure, and metrology apparatus | Johannes F. de Boer, Vasco Tomas Tenner, Christos MESSINIS | 2025-08-26 |
| 12393046 | Metrology systems, coherence scrambler illumination sources and methods thereof | Irwan Dani Setija, Mohamed Swillam, Arjan Johannes Anton Beukman | 2025-08-19 |
| 12366811 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Armand Eugene Albert Koolen, Nitesh Pandey, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2025-07-22 |
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Nitish Kumar, Jin LIAN +1 more | 2025-06-10 |
| 12306544 | Metrology tool with position control of projection system | Hans Butler, Mark Constant Johannes Baggen, Jeroen Arnoldus Leonardus Johannes Raaymakers, Richard Carl Zimmerman | 2025-05-20 |
| 12235096 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Henricus Petrus Maria Pellemans | 2025-02-25 |
| 12189305 | Metrology method and apparatus and computer program | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Kaustuve Bhattacharyya, Samee Ur Rehman | 2025-01-07 |
| 12158435 | Illumination and detection apparatus for a metrology apparatus | Nitesh Pandey, Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya | 2024-12-03 |
| 12130246 | Method for overlay metrology and apparatus thereof | Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya | 2024-10-29 |
| 12086973 | Detection apparatus for simultaneous acquisition of multiple diverse images of an object | Teunis Willem Tukker, Nitesh Pandey, Marinus Petrus REIJNDERS, Ferry Zijp | 2024-09-10 |
| 12067340 | Computational wafer inspection | Christophe David Fouquet, Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, James Benedict Kavanagh, James Patrick Koonmen +1 more | 2024-08-20 |
| 12066762 | On chip sensor for wafer overlay measurement | Mohamed Swillam, Stephen Roux, Tamer Elazhary | 2024-08-20 |
| 12061421 | Method and system for determining information about a target structure | Kaustuve Bhattacharyya, Keng-Fu Chang, Simon Gijsbert Josephus Mathijssen | 2024-08-13 |
| 12013647 | Metrology method | Simon Gijsbert Josephus Mathijssen, Marc Johannes Noot, Kaustuve Bhattacharyya, Grzegorz Grzela, Timothy Dugan Davis +4 more | 2024-06-18 |
| 12007700 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Armand Eugene Albert Koolen, Nitesh Pandey, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2024-06-11 |
| 11953450 | Diffraction based overlay metrology tool and method of diffraction based overlay metrology | — | 2024-04-09 |
| 11947269 | Method and apparatus to determine a patterning process parameter | Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes, Maria Isabel De La Fuente Valentin +2 more | 2024-04-02 |
| 11940739 | Metrology apparatus | Nitesh Pandey, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2024-03-26 |
| 11828585 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Henricus Petrus Maria Pellemans | 2023-11-28 |
| 11822254 | Metrology apparatus and a method of determining a characteristic of interest | Ronald Joseph Antonius Van Den Oetelaar | 2023-11-21 |
| 11815675 | Metrology device and phase modulator apparatus therefor comprising a first moving grating and a first compensatory grating element | Simon Reinald HUISMAN | 2023-11-14 |
| 11803130 | Phase modulators in alignment to decrease mark size | Franciscus Godefridus Casper Bijnen, Muhsin Eralp, Simon Reinald HUISMAN | 2023-10-31 |
| 11703772 | Recipe selection based on inter-recipe consistency | Timothy Dugan Davis, Peter David Engblom, Kaustuve Bhattacharyya | 2023-07-18 |