Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235096 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2025-02-25 |
| 12025925 | Metrology method and lithographic apparatuses | Filippo ALPEGGIANI, Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN | 2024-07-02 |
| 11828585 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2023-11-28 |
| 11525786 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2022-12-13 |
| 11428925 | Position metrology apparatus and associated optical elements | Arjan Johannes Anton Beukman, Alessandro Polo, Nitish Kumar | 2022-08-30 |
| 11372343 | Alignment method and associated metrology device | Henricus Martinus Johannes Van De Groes, Johannes Hubertus Antonius Van De Rijdt, Marcel Pieter Jacobus Peeters, Chien-Hung Tseng | 2022-06-28 |
| 11360399 | Metrology sensor for position metrology | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen | 2022-06-14 |
| 11307024 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2022-04-19 |
| 10955353 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2021-03-23 |
| 10591283 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2020-03-17 |
| 10241055 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2019-03-26 |
| 10209061 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2019-02-19 |
| 9933250 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2018-04-03 |
| 9921489 | Focus monitoring arrangement and inspection apparatus including such an arrangement | Amandev Singh | 2018-03-20 |
| 9753379 | Inspection apparatus and methods, methods of manufacturing devices | Amandev Singh, Patrick Warnaar | 2017-09-05 |
| 9357626 | Photon source, metrology apparatus, lithographic system and device manufacturing method | Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun, Johannes Matheus Marie De Wit, Ralph Jozef Johannes Gerardus Anna Maria SMEETS, Gerbrand Van Der Zouw | 2016-05-31 |
| 9158194 | Metrology method and apparatus, and device manufacturing method | Armand Eugene Albert Koolen, Maurits Van Der Schaar, Peter Clement Paul Vanoppen, Michael Kubis | 2015-10-13 |
| 9128065 | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method | Hugo Augustinus Joseph Cramer, Antoine Gaston Marie Kiers | 2015-09-08 |
| 8921814 | Photon source, metrology apparatus, lithographic system and device manufacturing method | Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun, Johannes Matheus Marie De Wit, Ralph Josef Johannes Gerardus Anna M Smeets, Gerbrand Van Der Zouw | 2014-12-30 |
| 8885150 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2014-11-11 |
| 8830472 | Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Martin Ebert | 2014-09-09 |
| 8760662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2014-06-24 |
| 8705007 | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method | Hugo Augustinus Joseph Cramer, Antoine Gaston Marie Kiers | 2014-04-22 |
| 8553218 | Calibration method and apparatus | Patricius Aloysius Jacobus Tinnemans, Gerbrand Van Der Zouw, Willem Marie Julia Marcel Coene | 2013-10-08 |
| 8553230 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2013-10-08 |