Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8411287 | Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate | Hendrik Jan Hidde Smilde, Arno Jan Bleeker, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Reinder Teun Plug +1 more | 2013-04-02 |
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2011-11-08 |
| 7869022 | Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system | Johan Maria Van Boxmeer, Robert Franken | 2011-01-11 |
| 7791732 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2010-09-07 |
| 7440079 | Lithographic apparatus, alignment system, and device manufacturing method | Arie Jeffrey Den Boef, Andre Bernardus Jeunink, Irwan Dani Setija, Cas Johannes Petrus Maria VAN NUENEN, Stefan Carolus Jacobus Antonius Keij | 2008-10-21 |
| 7403293 | Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method | Arie Jeffrey Den Boef, Wilhelmus Maria Corbeij, Hans Van Der Laan | 2008-07-22 |
| 7002667 | Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk +2 more | 2006-02-21 |
| 6995831 | Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure | Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk +2 more | 2006-02-07 |