Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422476 | Methods and apparatus for monitoring a lithographic manufacturing process | Emil Peter Schmitt-Weaver, Kaustuve Bhattacharyya, Wim Tjibbo Tel, Frank Staals | 2022-08-23 |
| 10935895 | Lithographic apparatus | Adrianus Hendrik Koevoets, Erik Johan Arlemark, Sander Catharina Reinier Derks, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk +5 more | 2021-03-02 |
| 10866527 | Methods and apparatus for monitoring a lithographic manufacturing process | Emil Peter Schmitt-Weaver, Kaustuve Bhattacharyya, Wim Tjibbo Tel, Frank Staals | 2020-12-15 |
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets +3 more | 2018-05-29 |
| 8797504 | Lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver, Oleg Viacheslavovich Voznyi +9 more | 2014-08-05 |
| 8730448 | Lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver +11 more | 2014-05-20 |
| 8514365 | Lithographic apparatus and device manufacturing method | Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders +10 more | 2013-08-20 |
| 8477287 | Device manufacturing method, lithographic apparatus and a computer program | Alex Oudshoorn, Erik Roelof Loopstra, Roland Blok | 2013-07-02 |
| 8368902 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Rene Oesterholt | 2013-02-05 |
| 8351022 | Radiation beam modification apparatus and method | Wilhelmus Petrus De Boeij | 2013-01-08 |
| 8289498 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Petrus Rutgerus Bartray, Bernardus Antonius Johannes Luttikhuis, Josephus Jacobus Smits, Anthonie Aantjes +7 more | 2012-10-16 |
| 7880901 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Rene Oesterholt | 2011-02-01 |
| 7859686 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Rene Oesterholt | 2010-12-28 |
| 7542127 | Lithographic apparatus and method for manufacturing a device | Timotheus Franciscus Sengers, Nicolaas Antonius Allegondus Johannes Van Asten, Wilhelmus Josephus Box, Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra +6 more | 2009-06-02 |
| 7528965 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Rene Oesterholt | 2009-05-05 |
| 7408655 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Rene Oesterholt | 2008-08-05 |
| 7292312 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Rene Oesterholt | 2007-11-06 |
| 7271917 | Lithographic apparatus, position quantity detection system and method | Edwin Teunis Van Donkelaar, Evert Hendrink Jan Draaijer, Nicolas Lallemant, Gerardus Martinus Antonius De Rooij | 2007-09-18 |
| 7256871 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Rene Oesterholt | 2007-08-14 |
| 7239368 | Using unflatness information of the substrate table or mask table for decreasing overlay | Rene Oesterholt, Ralph Brinkhof, Tjarko Adriaan Rudolf Van Empel, Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal +1 more | 2007-07-03 |
| 7170580 | Lithographic apparatus, projection system, method of projecting and device manufacturing method | Martinus Hendrikus Antonius Leenders, Henrikus Herman Marie Cox | 2007-01-30 |
| 7002667 | Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby | Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk, Henricus Petrus Maria Pellemans +2 more | 2006-02-21 |
| 6995831 | Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure | Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk, Henricus Petrus Maria Pellemans +2 more | 2006-02-07 |
| 6955074 | Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby | Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Gerrit Johannes Nijmeijer, Petra Albertina Margaretha Dekkers-Rog | 2005-10-18 |
| 6730920 | Abbe arm calibration system for use in lithographic apparatus | Rogier Herman Mathijs Groeneveld, Erik Roelof Loopstra, Jacobus Burghoom, Alexander Straaijer | 2004-05-04 |