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Lithographic apparatus and device manufacturing method |
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2021-05-11 |
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Lithographic apparatus and device manufacturing method |
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2021-03-30 |
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Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2020-09-29 |
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Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2020-06-09 |
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Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert |
2019-12-24 |
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Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +15 more |
2019-12-10 |
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Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard |
2019-10-15 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2019-07-09 |
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Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2019-04-16 |
| 10191389 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2019-01-29 |
| 10180629 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2019-01-15 |
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Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard |
2018-12-04 |
| 10025204 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert |
2018-07-17 |
| 9958787 |
Lithographic method and apparatus |
Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Christiaan Louis Valentin, Antonius Johannes Josephus Van Dijsseldonk |
2018-05-01 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2018-04-24 |
| 9804509 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard |
2017-10-31 |
| 9740107 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2017-08-22 |
| 9594308 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard |
2017-03-14 |
| 9568841 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert |
2017-02-14 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Klaus Simon +16 more |
2017-01-10 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra +8 more |
2016-11-01 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2016-06-14 |
| 9316919 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert |
2016-04-19 |
| 9213247 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Arjen Boogaard |
2015-12-15 |
| 9164401 |
Projection system and lithographic apparatus |
Erik Roelof Loopstra, Wilhelmus Petrus De Boeij, Hans Butler, Robertus Johannes Marinus De Jongh, Jan Bernard Plechelmus Van Schoot +2 more |
2015-10-20 |