Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088756 | Lithographic apparatus and method | Sander Kerssemakers, Gerben Frank DE LANGE, Christiaan Alexander Hoogendam, Petrus Franciscus Van Gils, Jelmer Mattheüs KAMMINGA +2 more | 2018-10-02 |
| 10001709 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels +2 more | 2018-06-19 |
| 9989864 | Lithographic method and apparatus | Johannes Jacobus Matheus Baselmans | 2018-06-05 |
| 9594306 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +2 more | 2017-03-14 |
| 9170498 | Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor | Marcus Adrianus Van De Kerkhof, Hendrikus Robertus Marie Van Greevenbroek, Michel François Hubert Klaassen, Martijn Gerard Dominique Wehrens, Haico Victor Kok +2 more | 2015-10-27 |
| 9164401 | Projection system and lithographic apparatus | Erik Roelof Loopstra, Hans Butler, Robertus Johannes Marinus De Jongh, Jan Bernard Plechelmus Van Schoot, Timotheus Franciscus Sengers +2 more | 2015-10-20 |
| 9097982 | Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter | Vadim Yevgenyevich Banine, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels | 2015-08-04 |
| 8675176 | Parameter control in a lithographic apparatus using polarization | Marinus Johanes Maria Van Dam, Johannes Wilhelmus De Klerk | 2014-03-18 |
| 8351022 | Radiation beam modification apparatus and method | Leon Martin Levasier | 2013-01-08 |
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Tilmann Heil, Damian Fiolka, Roel De Jonge | 2011-04-19 |
| 7889316 | Method for patterning a radiation beam, patterning device for patterning a radiation beam | Simon De Groot, Ewoud Vreugdenhil, Johannes Wilhelmus De Klerk | 2011-02-15 |
| 7535644 | Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Tammo Uitterdijk | 2009-05-19 |
| 7375799 | Lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hendrikus Robertus Marie Van Greevenbroek, Michel Fransois Hubert Klaassen, Martijn Gerard Dominique Wehrens, Tammo Uitterdijk | 2008-05-20 |
| 7345740 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Roel De Jonge, Tilmann Heil, Damian Fiolka | 2008-03-18 |
| 7317512 | Different polarization in cross-section of a radiation beam in a lithographic apparatus and device manufacturing method | Christian Wagner | 2008-01-08 |
| 7312852 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Tilmann Heil, Damian Fiolka | 2007-12-25 |
| 7245355 | Lithographic apparatus, device manufacturing method | Johannes Catharinus Hubertus Mulkens, Carsten Kohler | 2007-07-17 |
| 6906787 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Marcus Adrianus Van De Kerhof, Marcel Maurice Hemerik | 2005-06-14 |
| 6650399 | Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations | Johannes Jacobus Matheus Baselmans, Marco Hugo Petrus Moers, Hans Van Der Laan, Robert Wilhelm Willekers, Marcus Adrianus Van De Kerkhof | 2003-11-18 |