| 12422759 |
Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus |
— |
2025-09-23 |
| 12372888 |
Patterning device conditioning system and method |
Ferdinandus Martinus Jozef Henricus Van De Wetering, Andrei Mikhailovich Yakunin |
2025-07-29 |
| 12332570 |
Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris |
Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more |
2025-06-17 |
| 12287455 |
Oxygen-loss resistant top coating for optical elements |
Yue Ma, Qiushi Zhu, Klaus Hummler, Peter Matthew Mayer, Kay Hoffmann +3 more |
2025-04-29 |
| 12276815 |
EUV collector mirror |
— |
2025-04-15 |
| 12271008 |
Transmissive diffusor |
Andrey Nikipelov, Pieter-Jan Van Zwol, Laurentius Cornelius De Winter, Wouter Joep ENGELEN, Alexey Olegovich POLYAKOV |
2025-04-08 |
| 12249480 |
Fluid transfer system in a charged particle system |
Jing Zhang, Martijn Petrus Christianus Van Heumen, Patriek Adrianus Alphonsus Maria Bruurs, Erheng WANG, Vineet Sharma +4 more |
2025-03-11 |
| 12235592 |
Object holder, electrostatic sheet and method for making an electrostatic sheet |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koos Van Berkel, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin, Marinus Augustinus Christiaan Verschuren +7 more |
2025-02-25 |
| 12174552 |
Lithographic apparatus and electrostatic clamp designs |
Victor Antonio PEREZ-FALCON, Daniel Leslie Hall, Christopher Mason, Arthur Winfried Eduardus Minnaert, Johannes Hubertus Josephina Moors +1 more |
2024-12-24 |
| 12158706 |
Lithographic apparatus and method with improved contaminant particle capture |
Manish Ranjan |
2024-12-03 |
| 12117736 |
Lithographic apparatus |
Satish Achanta, Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Stef Marten Johan Janssens, Andrey Nikipelov |
2024-10-15 |
| 12072620 |
Method of manufacturing a membrane assembly |
Pieter-Jan Van Zwol, Sander Baltussen, Dennis De Graaf, Johannes Christiaan Leonardus Franken, Adrianus Johannes Maria Giesbers +11 more |
2024-08-27 |
| 12066758 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2024-08-20 |
| 12001149 |
Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus |
— |
2024-06-04 |
| 11996262 |
Fluid transfer system in a charged particle system |
Jing Zhang, Martijn Petrus Christianus Van Heumen, Patriek Adrianus Alphonsus Maria Bruurs, Erheng WANG, Vineet Sharma +4 more |
2024-05-28 |
| 11906907 |
Apparatus and method for determining a condition associated with a pellicle |
Derk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Richard David Jacobs, Andrew Judge +5 more |
2024-02-20 |
| 11762281 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
2023-09-19 |
| 11673169 |
Membrane cleaning apparatus |
Andrey Nikipelov, Dmitry KURILOVICH, Fabio SBRIZZAI, Ties Wouter VAN DER WOORD, Willem Joan Van Der Zande +2 more |
2023-06-13 |
| 11347142 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2022-05-31 |
| 11320731 |
Membrane for EUV lithography |
Pieter-Jan Van Zwol, Dennis De Graaf, Paul Janssen, Mária Péter, Willem Joan Van Der Zande +2 more |
2022-05-03 |
| 11294291 |
Lithographic apparatus |
Johannes Hubertus Josephina Moors |
2022-04-05 |
| 11287753 |
Cleaning apparatus and methods of cleaning |
— |
2022-03-29 |
| 11163240 |
Heating system for an optical component of a lithographic apparatus |
Franciscus Johannes Joseph Janssen |
2021-11-02 |
| 11150560 |
Projection system and mirror and radiation source for a lithographic apparatus |
Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal |
2021-10-19 |
| 11048180 |
Component for use in a patterning device environment |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Christian Gerardus Norbertus Hendricus Marie Cloin, Edwin Te Sligte, Ferdinandus Martinus Jozef Henricus Van De Wetering |
2021-06-29 |