Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174552 | Lithographic apparatus and electrostatic clamp designs | Marcus Adrianus Van De Kerkhof, Daniel Leslie Hall, Christopher Mason, Arthur Winfried Eduardus Minnaert, Johannes Hubertus Josephina Moors +1 more | 2024-12-24 |
| 12117731 | Method for producing a mirror of a microlithographic projection exposure apparatus | Christoph Zaczek, Erik Loopstra, Eric Eva, Drew Chieda, Matthew Lipson +1 more | 2024-10-15 |
| 11892779 | Optical component and clamp used in lithographic apparatus | — | 2024-02-06 |
| 11550231 | Apparatus for and method of in-situ particle removal in a lithography apparatus | Jeffrey John Lombardo, Ronald Peter Albright, Daniel Leslie Hall, Andrew Judge | 2023-01-10 |
| 11500298 | Reticle sub-field thermal control | Eric Justin MONKMAN, Michael Andrew Chieda, Stephen Roux | 2022-11-15 |
| 11333984 | Apparatus for and method of in-situ particle removal in a lithography apparatus | Richard Joseph Bruls, Ronald Peter Albright, Peter Kochersperger | 2022-05-17 |
| 11048175 | Apparatus for and method cleaning a support inside a lithography apparatus | Michael Andrew Chieda | 2021-06-29 |