Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399000 | Systems and methods for measuring intensity in a lithographic alignment apparatus | Mohamed Swillam, Justin Kreuzer, Michael L. Nelson, Muhsin Eralp | 2025-08-26 |
| 12298257 | Monolithic particle inspection device | Ilse VAN WEPEREN, Arjan Johannes Anton Beukman, Mohamed Swillam, Justin Kreuzer | 2025-05-13 |
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Sergei Sokolov, Filippo ALPEGGIANI | 2025-04-29 |
| 12216414 | Self-referencing integrated alignment sensor | Mohamed Swillam, Justin Kreuzer | 2025-02-04 |
| 12140872 | Optical designs of miniaturized overlay measurement system | Mohamed Swillam, Tamer Elazhary, Yevgeniy Konstantinovich Shmarev | 2024-11-12 |
| 12135505 | Spectrometric metrology systems based on multimode interference and lithographic apparatus | Mohamed Swillam, Justin Kreuzer | 2024-11-05 |
| 12066762 | On chip sensor for wafer overlay measurement | Mohamed Swillam, Tamer Elazhary, Arie Jeffrey Den Boef | 2024-08-20 |
| 11994808 | Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof | Mohamed Swillam, Tamer Elazhary, Yuxiang Lin, Justin Kreuzer | 2024-05-28 |
| 11500298 | Reticle sub-field thermal control | Eric Justin MONKMAN, Michael Andrew Chieda, Victor Antonio PEREZ-FALCON | 2022-11-15 |
| 11415893 | Assembly for use in semiconductor photolithography and method of manufacturing same | Christopher Reed | 2022-08-16 |
| 11009803 | Mask assembly | Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more | 2021-05-18 |
| 10558129 | Mask assembly | Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more | 2020-02-11 |
| 9740112 | Patterning device support and lithographic apparatus | Arindam Sinharoy, Jean-Philippe Xavier Van Damme, Daniel Nathan Burbank, Mark Josef Schuster, Duncan G. Harris +1 more | 2017-08-22 |
| 8553205 | Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus | Frederick Carter, Ross Ian Mackenzie | 2013-10-08 |
| 7853067 | Systems and methods for lithographic reticle inspection | — | 2010-12-14 |
| 7751130 | Optical element damping systems | Peter Kochersperger, Justin Kreuzer | 2010-07-06 |
| 7692766 | Lithographic apparatus | — | 2010-04-06 |
| 7633599 | Apparatuses and methods for changing an intensity distribution of light within an illumination field without distorting the telecentricity of the light | Erik Roelof Loopstra, Michael L. Nelson | 2009-12-15 |
| 7474384 | Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus | Arno Jan Bleeker, Dominicus Jacobus Petrus Adrianus Franken, Michael L. Nelson | 2009-01-06 |
| 7372548 | Levitated reticle-masking blade stage | Frederick Carter, Daniel N. Galburt | 2008-05-13 |
| 7359037 | Drive for reticle-masking blade stage | Frederick Carter, Daniel N. Galburt | 2008-04-15 |
| 7298459 | Wafer handling method for use in lithography patterning | Santiago del Puerto, Justin Kreuzer | 2007-11-20 |
| 7279110 | Method and apparatus for creating a phase step in mirrors used in spatial light modulator arrays | — | 2007-10-09 |
| 7136151 | Reticle gripper barrier system for lithography use | Richard Lenox | 2006-11-14 |
| 7136214 | Active faceted mirror system for lithography | Erik Roelof Loopstra | 2006-11-14 |