Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393046 | Metrology systems, coherence scrambler illumination sources and methods thereof | Irwan Dani Setija, Arie Jeffrey Den Boef, Mohamed Swillam | 2025-08-19 |
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arie Jeffrey Den Boef, Sebastianus Adrianus GOORDEN, Nitish Kumar, Jin LIAN +1 more | 2025-06-10 |
| 12298257 | Monolithic particle inspection device | Ilse VAN WEPEREN, Mohamed Swillam, Justin Kreuzer, Stephen Roux | 2025-05-13 |
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Sebastianus Adrianus GOORDEN, Stephen Roux, Sergei Sokolov, Filippo ALPEGGIANI | 2025-04-29 |
| 11906906 | Metrology method and associated metrology and lithographic apparatuses | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN | 2024-02-20 |
| 11428925 | Position metrology apparatus and associated optical elements | Alessandro Polo, Henricus Petrus Maria Pellemans, Nitish Kumar | 2022-08-30 |