Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Sebastianus Adrianus GOORDEN, Nitish Kumar, Jin LIAN +1 more | 2025-06-10 |
| 12282263 | Metrology system and lithographic system | Sebastianus Adrianus GOORDEN | 2025-04-22 |
| 12124177 | Overlay measurement system using lock-in amplifier technique | Mohamed Swillam, Justin Kreuzer | 2024-10-22 |
| 12025925 | Metrology method and lithographic apparatuses | Filippo ALPEGGIANI, Henricus Petrus Maria Pellemans, Sebastianus Adrianus GOORDEN | 2024-07-02 |
| 11906906 | Metrology method and associated metrology and lithographic apparatuses | Sebastianus Adrianus GOORDEN, Arjan Johannes Anton Beukman | 2024-02-20 |
| 11815675 | Metrology device and phase modulator apparatus therefor comprising a first moving grating and a first compensatory grating element | Arie Jeffrey Den Boef | 2023-11-14 |
| 11803130 | Phase modulators in alignment to decrease mark size | Franciscus Godefridus Casper Bijnen, Muhsin Eralp, Arie Jeffrey Den Boef | 2023-10-31 |
| 11762305 | Alignment method | Sergei Sokolov, Filippo ALPEGGIANI, Sebastianus Adrianus GOORDEN | 2023-09-19 |
| 11556068 | Detection system for an alignment sensor | — | 2023-01-17 |
| 11474435 | Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter | Sebastianus Adrianus GOORDEN, Sergei Sokolov | 2022-10-18 |
| 11409206 | Alignment method and apparatus | Sebastianus Adrianus GOORDEN | 2022-08-09 |
| 11360399 | Metrology sensor for position metrology | Sebastianus Adrianus GOORDEN, Simon Gijsbert Josephus Mathijssen, Henricus Petrus Maria Pellemans | 2022-06-14 |
| 11333985 | Position sensor | Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo, Johannes Antonius Gerardus Akkermans, Arie Jeffrey Den Boef | 2022-05-17 |
| 11300892 | Sensor apparatus and method for lithographic measurements | Alessandro Polo | 2022-04-12 |
| 11221565 | Level sensor and lithographic apparatus | Marinus Petrus REIJNDERS | 2022-01-11 |
| 11181835 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Johannes Antonius Gerardus Akkermans, Tamer Elazhary | 2021-11-23 |
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN, Justin Kreuzer +4 more | 2021-11-16 |
| 11042096 | Alignment measurement system | Stefan Michiel Witte, Alessandro Antoncecchi, Hao Zhang, Stephen EDWARD, Paulus Clemens Maria PLANKEN +3 more | 2021-06-22 |
| 10942461 | Alignment measurement system | Sebastianus Adrianus GOORDEN, Irwan Dani Setija | 2021-03-09 |
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo, Simon Gijsbert Josephus Mathijssen | 2020-09-29 |
| 10788765 | Method and apparatus for measuring a structure on a substrate | Stefan Michiel Witte, Alessandro Antoncecchi, Stephen EDWARD, Hao Zhang, Paulus Clemens Maria PLANKEN +3 more | 2020-09-29 |
| 10690995 | Radiation source | Nitish Kumar | 2020-06-23 |
| 10682777 | Blade set and hair cutting appliance | Geert Veenstra | 2020-06-16 |
| 10585363 | Alignment system | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Alessandro Polo, Patricius Aloysius Jacobus Tinnemans, Adrianus Johannes Hendrikus Schellekens +3 more | 2020-03-10 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Gijsbert Josephus Mathijssen, Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo | 2020-01-07 |