Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306541 | Lithographic apparatus, metrology systems, illumination switches and methods thereof | Mohamed Swillam | 2025-05-20 |
| 12124173 | Lithographic apparatus, metrology systems, illumination sources and methods thereof | Mohamed Swillam | 2024-10-22 |
| 12086973 | Detection apparatus for simultaneous acquisition of multiple diverse images of an object | Teunis Willem Tukker, Arie Jeffrey Den Boef, Nitesh Pandey, Ferry Zijp | 2024-09-10 |
| 11971663 | Light sources and methods of controlling; devices and methods for use in measurement applications | Hendrik Sabert, Patrick Sebastian Uebel | 2024-04-30 |
| 11940739 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more | 2024-03-26 |
| 11467505 | Height sensor, lithographic apparatus and method for manufacturing devices | Hans Butler, Johannes Petrus Martinus Bernardus Vermeulen | 2022-10-11 |
| 11262661 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more | 2022-03-01 |
| 11221565 | Level sensor and lithographic apparatus | Simon Reinald HUISMAN | 2022-01-11 |
| 10241425 | Level sensor, lithographic apparatus and device manufacturing method | — | 2019-03-26 |