Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940739 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2024-03-26 |
| 11927891 | Apparatus and methods for determining the position of a target structure on a substrate | Nitesh Pandey, Alessandro Polo, Sebastianus Adrianus GOORDEN | 2024-03-12 |
| 11333985 | Position sensor | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Alessandro Polo, Johannes Antonius Gerardus Akkermans, Arie Jeffrey Den Boef | 2022-05-17 |
| 11262661 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2022-03-01 |
| 11243470 | Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method | Nitish Kumar, Adrianus Johannes Hendrikus Schellekens, Sietse Thijmen Van Der Post, Ferry Zijp, Willem Coene +2 more | 2022-02-08 |
| 11086240 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Nitesh Pandey, Alessandro Polo, Simon Reinaid Huisman | 2021-08-10 |
| 11042100 | Measurement apparatus and method of measuring a target | Jin LIAN, Zili Zhou, Sergey Tarabrin | 2021-06-22 |
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Jin LIAN | 2021-02-02 |
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Alessandro Polo, Simon Gijsbert Josephus Mathijssen | 2020-09-29 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen, Sebastianus Adrianus GOORDEN, Alessandro Polo | 2020-01-07 |
| 10444640 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Jin LIAN | 2019-10-15 |
| 10317808 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Simon Reinald HUISMAN, Alessandro Polo, Sebastianus Adrianus GOORDEN, Arie Jeffrey Den Boef | 2019-06-11 |
| 10234767 | Device and method for processing a radiation beam with coherence | Sebastianus Adrianus GOORDEN, Nitesh Pandey, Teunis Willem Tukker, Johannes Matheus Marie De Wit | 2019-03-19 |
| 10185224 | Method and apparatus for inspection and metrology | Ferry Zijp, Peter Danny Van Voorst, Jeroen Johan Maarten Van De Wijdeven, Koos Van Berkel | 2019-01-22 |
| 10126659 | Method and apparatus for inspection and metrology | Ferry Zijp, Sietse Thijmen Van Der Post, Fanhe Kong | 2018-11-13 |
| 9927722 | Method and apparatus for inspection and metrology | Koos Van Berkel, Jeroen Johan Maarten Van De Wijdeven, Ferry Zijp | 2018-03-27 |
| 9811001 | Method and apparatus for inspection and metrology | Peter Danny Van Voorst, Koos Van Berkel, Jeroen Johan Maarten Van De Wijdeven, Ferry Zijp | 2017-11-07 |