Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416870 | Measuring method and measuring apparatus | Johan REININK, Jeroen COTTAAR, Sjoerd Nicolaas Lambertus Donders | 2025-09-16 |
| 12269229 | Reflector manufacturing method and associated reflector | Sander Bas Roobol | 2025-04-08 |
| 12164125 | Manufacturing a reflective diffraction grating | Han-Kwang Nienhuys | 2024-12-10 |
| 11815402 | Wavefront sensor and associated metrology apparatus | Peter Danny Van Voorst | 2023-11-14 |
| 11626704 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Sander Bas Roobol, Pavel Evtushenko | 2023-04-11 |
| 11243470 | Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method | Nitish Kumar, Adrianus Johannes Hendrikus Schellekens, Ferry Zijp, Willem Coene, Peter Danny Van Voorst +2 more | 2022-02-08 |
| 10725381 | Optical systems, metrology apparatus and associated method | Stefan Michael Bruno Bäumer, Peter Danny Van Voorst, Teunis Willem Tukker, Ferry Zijp, Han-Kwang Nienhuys +1 more | 2020-07-28 |
| 10712673 | Method of determining a property of a structure, inspection apparatus and device manufacturing method | Koos Van Berkel | 2020-07-14 |
| 10613448 | Method and apparatus for determining alignment properties of a beam of radiation | — | 2020-04-07 |
| 10578979 | Method and apparatus for inspection and metrology | Ferry Zijp, Sander Bas Roobol | 2020-03-03 |
| 10488765 | Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus | Johan Maria Van Boxmeer, Marinus Johannes Maria Van Dam, Koos Van Berkel, Johannes Hubertus Antonius Van De Rijdt | 2019-11-26 |
| 10451559 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2019-10-22 |
| 10330606 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2019-06-25 |
| 10248029 | Method and apparatus for inspection and metrology | Ferry Zijp, Sander Bas Roobol | 2019-04-02 |
| 10126659 | Method and apparatus for inspection and metrology | Ferry Zijp, Fanhe Kong, Duygu Akbulut | 2018-11-13 |
| 9851246 | Method and apparatus for inspection and metrology | — | 2017-12-26 |