Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243470 | Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method | Nitish Kumar, Sietse Thijmen Van Der Post, Ferry Zijp, Willem Coene, Peter Danny Van Voorst +2 more | 2022-02-08 |
| 10585363 | Alignment system | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Alessandro Polo, Patricius Aloysius Jacobus Tinnemans, Elahe Yeganegi Dastgerdi +3 more | 2020-03-10 |
| 9081303 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Michael Kubis | 2015-07-14 |
| 8994944 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Michael Kubis | 2015-03-31 |