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Metrology method and associated metrology and lithographic apparatuses |
Patricius Aloysius Jacobus Tinnemans, Igor Matheus Petronella Aarts, Kaustuve Bhattacharyya, Ralph Brinkhof, Leendert Jan KARSSEMEIJER +4 more |
2024-07-09 |
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Measurement apparatus and a method for determining a substrate grid |
Franciscus Godefridus Casper Bijnen, Edo Maria Hulsebos, Robert John Socha, Youping Zhang |
2024-04-23 |
| 11079684 |
Measurement apparatus and a method for determining a substrate grid |
Franciscus Godefridus Casper Bijnen, Edo Maria Hulsebos, Robert John Socha, Youping Zhang |
2021-08-03 |
| 11029610 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees, Willem Seine Christian Roelofs +11 more |
2021-06-08 |
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Source separation from metrology data |
Scott Anderson Middlebrooks, Omer Abubaker Omer Adam, Adrianus Cornelis Matheus Koopman, Arie Jeffrey Den Boef |
2021-05-25 |
| 10962887 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Sudharshanan Raghunathan, Boris Menchtchikov, Ahmet Koray Erdamar +13 more |
2021-03-30 |
| 10527958 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Sudharshanan Raghunathan, Boris Menchtchikov, Ahmet Koray Erdamar +13 more |
2020-01-07 |
| 10180628 |
Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method |
Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Maurits Van Der Schaar, Te-Chih Huang |
2019-01-15 |
| 9696635 |
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process |
Adrianus Fransiscus Petrus Engelen, Johannes Catharinus Hubertus Mulkens, Robert Kazinczi, Jen-Shiang Wang |
2017-07-04 |
| 9518936 |
Method and apparatus for determining lithographic quality of a structure |
Willem Jan Grootjans, Jouke Krist, Miguel GARCIA GRANDA, Lu Xu |
2016-12-13 |
| 9081303 |
Methods and scatterometers, lithographic systems, and lithographic processing cells |
Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis |
2015-07-14 |
| 8994944 |
Methods and scatterometers, lithographic systems, and lithographic processing cells |
Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis |
2015-03-31 |
| 8982328 |
Method and apparatus for overlay measurement |
Johannes Anna Quaedackers, Christian Marinus Leewis, Peter Clement Paul Vanoppen |
2015-03-17 |
| 8706442 |
Alignment system, lithographic system and method |
Everhardus Cornelis Mos, Maurits Van Der Schaar, Hubertus Johannes Gertrudus Simons, Scott Anderson Middlebrooks |
2014-04-22 |
| 8502955 |
Method of determining a characteristic |
Johannes Anna Quaedackers, Christian Marinus Leewis, Peter Clement Paul Vanoppen |
2013-08-06 |
| 8390823 |
Method, inspection apparatus and substrate for determining an approximate structure of an object on a substrate |
Hugo Augustinus Joseph Cramer |
2013-03-05 |
| 7468795 |
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same |
Hubertus Johannes Gertrudus Simons, Everhardus Cornelis Mos, Leonardus Henricus Marie Verstappen, Roy Werkman, Henricus Jacobus Maria Verhoeven |
2008-12-23 |