Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055904 | Method to predict yield of a device manufacturing process | Youping Zhang, Cyrus E. Tabery, Yi Zou, Chenxi Lin, Yana Cheng +2 more | 2024-08-06 |
| 12044980 | Method of manufacturing devices | Abraham SLACHTER, Wim Tjibbo Tel, Daan Maurits Slotboom, Vadim Yourievich TIMOSHKOV, Koen Wilhelmus Cornelis Adrianus Van Der Straten +7 more | 2024-07-23 |
| 11947266 | Method for controlling a manufacturing process and associated apparatuses | Nicolaas Petrus Marcus Brantjes, Matthijs Cox, Cyrus E. Tabery, Youping Zhang, Yi Zou +4 more | 2024-04-02 |
| 11803127 | Method for determining root cause affecting yield in a semiconductor manufacturing process | Chenxi Lin, Cyrus E. Tabery, Hakki Ergün Cekli, Simon Philip Spencer Hastings, Yi Zou +5 more | 2023-10-31 |
| 11714357 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2023-08-01 |
| 11378893 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2022-07-05 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2021-08-10 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Ahmet Koray Erdamar +13 more | 2021-03-30 |
| 10838310 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2020-11-17 |
| 10527958 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Ahmet Koray Erdamar +13 more | 2020-01-07 |
| 10254663 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2019-04-09 |
| 9903823 | Metrology method and apparatus | Yen-Wen Lu, Jay Jianhui Chen, Wei-Cheng Liu, Jen-Shiang Wang, Te-Chih Huang | 2018-02-27 |
| 9395633 | Lithographic cluster system, method for calibrating a positioning device of a lithographic apparatus | Alexander Alexandrovich Danilin, Alejandro Xabier Arrizabalaga Uriarte, Alexander Padiy | 2016-07-19 |
| 9310698 | Method and apparatus for controlling a lithographic apparatus | Alexander Padiy | 2016-04-12 |
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2016-02-23 |
| 9188880 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2015-11-17 |
| 9134625 | Lithographic apparatus and device manufacturing method for measuring wafer parameters using non-standard alignment settings | Alexander Padiy | 2015-09-15 |
| 9069240 | Calibration of lithographic apparatus by exposing patterns on substrate positioned at different orientations | Alexander Padiy | 2015-06-30 |
| 8947643 | Lithographic apparatus and method controlling parameter drift by performing multiple patterning passes on reference substrate | Alexander Padiy | 2015-02-03 |
| 8947630 | Lithographic apparatus and device manufacturing method | Alexander Padiy, Scott Anderson Middlebrooks | 2015-02-03 |
| 8793099 | Calibration of lithographic apparatus | Alexander Padiy | 2014-07-29 |
| 8717536 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Alexander Padiy | 2014-05-06 |
| 8687167 | Lithographic apparatus and device manufacturing method | Alexander Padiy | 2014-04-01 |
| 7804575 | Lithographic apparatus and device manufacturing method having liquid evaporation control | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2010-09-28 |
| 7710538 | Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate | Frederik Eduard De Jong | 2010-05-04 |