| 12169366 |
Voltage contrast metrology mark |
Simon Hendrik Celine Van Gorp, Simon Philip Spencer Hastings, Brennan Peterson |
2024-12-17 |
$305,277,000 |
| 12055904 |
Method to predict yield of a device manufacturing process |
Youping Zhang, Boris Menchtchikov, Yi Zou, Chenxi Lin, Yana Cheng +2 more |
2024-08-06 |
$211,869,000 |
| 12044980 |
Method of manufacturing devices |
Abraham SLACHTER, Wim Tjibbo Tel, Daan Maurits Slotboom, Vadim Yourievich TIMOSHKOV, Koen Wilhelmus Cornelis Adrianus Van Der Straten +7 more |
2024-07-23 |
$114,962,000 |
| 11947266 |
Method for controlling a manufacturing process and associated apparatuses |
Nicolaas Petrus Marcus Brantjes, Matthijs Cox, Boris Menchtchikov, Youping Zhang, Yi Zou +4 more |
2024-04-02 |
$107,364,000 |
| 11803127 |
Method for determining root cause affecting yield in a semiconductor manufacturing process |
Chenxi Lin, Hakki Ergün Cekli, Simon Philip Spencer Hastings, Boris Menchtchikov, Yi Zou +5 more |
2023-10-31 |
$61,384,000 |
| 11714357 |
Method to predict yield of a device manufacturing process |
Alexander Ypma, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag, Hakki Ergün Cekli +9 more |
2023-08-01 |
$215,083,000 |
| 11181829 |
Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process |
Hakki Ergün Cekli, Simon Hendrik Celine Van Gorp, Chenxi Lin |
2021-11-23 |
$63,319,000 |
| 11086229 |
Method to predict yield of a device manufacturing process |
Alexander Ypma, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag, Hakki Ergün Cekli +9 more |
2021-08-10 |
$38,498,000 |
| 8629535 |
Mask for forming integrated circuit |
Richard J. Huang, Scott A. Bell, Srikanteswara Dakshina-Murthy, Philip A. Fisher, Richard Nguyen +1 more |
2014-01-14 |
$18,205,000 |
| 8580660 |
Double and triple gate MOSFET devices and methods for making same |
Ming-Ren Lin, Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu |
2013-11-12 |
$1,972,000 |
| 8222680 |
Double and triple gate MOSFET devices and methods for making same |
Ming-Ren Lin, Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu |
2012-07-17 |
$8,676,000 |
| 7915160 |
Methods for forming small contacts |
Srikanteswara Dakshina-Murthy, Chih-Yuh Yang, Bin Yu |
2011-03-29 |
$9,579,000 |
| 7855048 |
Wafer assembly having a contrast enhancing top anti-reflecting coating and method of lithographic processing |
Bruno M. LaFontaine, Adam R. Pawloski, Jongwook Kye |
2010-12-21 |
$14,741,000 |
| 7741012 |
Method for removal of immersion lithography medium in immersion lithography processes |
Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Ivan Lalovic +3 more |
2010-06-22 |
$10,015,000 |
| 7657864 |
System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques |
Todd P. Lukanc, Chris Haidinyak, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim +1 more |
2010-02-02 |
$18,664,000 |
| 7543256 |
System and method for designing an integrated circuit device |
Todd P. Lukanc, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim, Christopher A. Spence +1 more |
2009-06-02 |
$11,563,000 |
| 7521304 |
Method for forming integrated circuit |
Richard J. Huang, Scott A. Bell, Srikanteswara Dakshina-Murthy, Philip A. Fisher, Richard Nguyen +1 more |
2009-04-21 |
$10,235,000 |
| 7432558 |
Formation of semiconductor devices to achieve <100> channel orientation |
Shibly S. Ahmed, Judy Xilin An, Srikanteswara Dakshina-Murthy, Bin Yu |
2008-10-07 |
$7,530,000 |
| 7384725 |
System and method for fabricating contact holes |
Anna M. Minvielle, Hung-Eil Kim, Jongwook Kye |
2008-06-10 |
$9,127,000 |
| 7351638 |
Scanning laser thermal annealing |
Eric N. Paton, Bin Yu, Qi Xiang, Robert B. Ogle |
2008-04-01 |
$18,550,000 |
| 7313769 |
Optimizing an integrated circuit layout by taking into consideration layout interactions as well as extra manufacturability margin |
Todd P. Lukanc, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim, Christopher A. Spence +1 more |
2007-12-25 |
|
| 7276328 |
Lithography mask utilizing asymmetric light source |
Bruno M. LaFontaine, Ivan Lavolic |
2007-10-02 |
$16,573,000 |
| 7269804 |
System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques |
Todd P. Lukanc, Chris Haidinyak, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim +1 more |
2007-09-11 |
$10,117,000 |
| 7211489 |
Localized halo implant region formed using tilt pre-amorphization implant and laser thermal anneal |
Qi Xiang, Robert B. Ogle, Eric N. Paton, Bin Yu |
2007-05-01 |
$26,379,000 |
| 7207017 |
Method and system for metrology recipe generation and review and analysis of design, simulation and metrology results |
Chris Haidinyak, Todd P. Lukanc, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim +1 more |
2007-04-17 |
$14,172,000 |
