| 12416854 |
Machine learning based subresolution assist feature placement |
Jun Tao, Yu Cao |
2025-09-16 |
|
| 11953823 |
Measurement method and apparatus |
— |
2024-04-09 |
$114,337,000 |
| 10670973 |
Coloring aware optimization |
Yi Zou, Jing Su, Robert John Socha, Duan-Fu Stephen Hsu |
2020-06-02 |
$38,904,000 |
| 9250538 |
Efficient optical proximity correction repair flow method and apparatus |
Guoxiang Ning, Paul Ackmann, Chin Teong Lim |
2016-02-02 |
$567,000 |
| 7788609 |
Method and apparatus for optimizing an optical proximity correction model |
Hung-Eil Kim, Eun Joo Lee |
2010-08-31 |
$5,571,000 |
| 7657864 |
System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques |
Cyrus E. Tabery, Todd P. Lukanc, Chris Haidinyak, Luigi Capodieci, Carl P. Babcock +1 more |
2010-02-02 |
$18,664,000 |
| 7543256 |
System and method for designing an integrated circuit device |
Todd P. Lukanc, Cyrus E. Tabery, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim +1 more |
2009-06-02 |
$11,563,000 |
| 7313769 |
Optimizing an integrated circuit layout by taking into consideration layout interactions as well as extra manufacturability margin |
Todd P. Lukanc, Cyrus E. Tabery, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim +1 more |
2007-12-25 |
|
| 7269804 |
System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques |
Cyrus E. Tabery, Todd P. Lukanc, Chris Haidinyak, Luigi Capodieci, Carl P. Babcock +1 more |
2007-09-11 |
$10,117,000 |
| 7207017 |
Method and system for metrology recipe generation and review and analysis of design, simulation and metrology results |
Cyrus E. Tabery, Chris Haidinyak, Todd P. Lukanc, Luigi Capodieci, Carl P. Babcock +1 more |
2007-04-17 |
$14,172,000 |
| 7194725 |
System and method for design rule creation and selection |
Todd P. Lukanc, Cyrus E. Tabery, Luigi Capodieci, Carl P. Babcock, Hung-Eil Kim +1 more |
2007-03-20 |
$9,786,000 |
| 7120285 |
Method for evaluation of reticle image using aerial image simulator |
— |
2006-10-10 |
$21,906,000 |
| 7071085 |
Predefined critical spaces in IC patterning to reduce line end pull back |
Todd P. Lukanc, Luigi Capodieci, Joerg Reiss, Sarah N. McGowan |
2006-07-04 |
|
| 7027130 |
Device and method for determining an illumination intensity profile of an illuminator for a lithography system |
Todd P. Lukanc, Luigi Capodieci, Joerg Reiss, Sarah N. McGowan |
2006-04-11 |
$9,016,000 |
| 7015148 |
Reduce line end pull back by exposing and etching space after mask one trim and etch |
Todd P. Lukanc, Luigi Capodieci, Joerg Reiss, Sarah N. McGowan |
2006-03-21 |
$13,217,000 |
| 6994939 |
Semiconductor manufacturing resolution enhancement system and method for simultaneously patterning different feature types |
Kouros Ghandehari, Jean Y. Yang |
2006-02-07 |
$12,481,000 |
| 6974652 |
Lithographic photomask and method of manufacture to improve photomask test measurement |
Todd P. Lukanc, Luigi Capodieci, Bhanwar Singh |
2005-12-13 |
$8,414,000 |
| 6818358 |
Method of extending the areas of clear field phase shift generation |
Todd P. Lukanc |
2004-11-16 |
$6,082,000 |
| 6797438 |
Method and enhancing clear field phase shift masks with border around edges of phase regions |
Todd P. Lukanc |
2004-09-28 |
$1,915,000 |
| 6749970 |
Method of enhancing clear field phase shift masks with border regions around phase 0 and phase 180 regions |
Todd P. Lukanc |
2004-06-15 |
$4,556,000 |
| 6749971 |
Method of enhancing clear field phase shift masks with chrome border around phase 180 regions |
Todd P. Lukanc |
2004-06-15 |
$4,556,000 |
| 6675369 |
Method of enhancing clear field phase shift masks by adding parallel line to phase 0 region |
Todd P. Lukanc |
2004-01-06 |
$4,179,000 |
| 6627355 |
Method of and system for improving stability of photomasks |
Harry J. Levinson, Fan Piao |
2003-09-30 |
$4,535,000 |
| 6562639 |
Utilizing electrical performance data to predict CD variations across stepper field |
Anna M. Minvielle, Luigi Capodieci |
2003-05-13 |
$1,759,000 |
| 6492066 |
Characterization and synthesis of OPC structures by fourier space analysis and/or wavelet transform expansion |
Luigi Capodieci |
2002-12-10 |
$2,246,000 |
