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Multilayer low reflectivity hard mask and process therefor |
Kouros Ghandehari, Marina V. Plat, Hirokazu Tokuno |
2012-11-13 |
| 8048797 |
Multilayer low reflectivity hard mask and process therefor |
Kouros Ghandehari, Marina V. Plat, Hirokazu Tokuno |
2011-11-01 |
| 7538026 |
Multilayer low reflectivity hard mask and process therefor |
Kouros Ghandehari, Marina V. Plat, Hirokazu Tokuno |
2009-05-26 |
| 7507661 |
Method of forming narrowly spaced flash memory contact openings and lithography masks |
Emmanuil H. Lingunis, Ning Cheng, Mark T. Ramsbey, Kouros Ghandehari, Hung-Eil Kim |
2009-03-24 |
| 7427457 |
Methods for designing grating structures for use in situ scatterometry to detect photoresist defects |
Marina V. Plat, Calvin T. Gabriel, Christopher F. Lyons |
2008-09-23 |
| 7384725 |
System and method for fabricating contact holes |
Cyrus E. Tabery, Hung-Eil Kim, Jongwook Kye |
2008-06-10 |
| 7112489 |
Negative resist or dry develop process for forming middle of line implant layer |
Christopher F. Lyons, Marina V. Plat |
2006-09-26 |
| 7018922 |
Patterning for elongated VSS contact flash memory |
Hung-Eil Kim, Christopher F. Lyons, Marina V. Plat, Ramkumar Subramanian |
2006-03-28 |
| 6900124 |
Patterning for elliptical Vss contact on flash memory |
Hung-Eil Kim, Christopher F. Lyons, Marina V. Plat, Ramkumar Subramanian |
2005-05-31 |
| 6562639 |
Utilizing electrical performance data to predict CD variations across stepper field |
Luigi Capodieci, Christopher A. Spence |
2003-05-13 |
| 6493063 |
Critical dimension control improvement method for step and scan photolithography |
Rolf Seltmann |
2002-12-10 |
| 6255125 |
Method and apparatus for compensating for critical dimension variations in the production of a semiconductor wafer |
Regina Tien Schmidt, Christopher A. Spence, Marina V. Plat, Khanh B. Nguyen |
2001-07-03 |
| 5985498 |
Method of characterizing linewidth errors in a scanning lithography system |
Harry J. Levinson, Khanh B. Nguyen |
1999-11-16 |
| 5963816 |
Method for making shallow trench marks |
Larry Wang, Craig S. Sander |
1999-10-05 |