Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966315 | Advanced process control methods for process-aware dimension targeting | Philipp Jaschinsky, Frank Kahlenberg, Sirko Kramp, Roberto Schiwon | 2018-05-08 |
| 8605250 | Method and system for detecting particle contamination in an immersion lithography tool | Rene Wirtz | 2013-12-10 |
| 8332783 | Control of critical dimensions in optical imaging processes for semiconductor production by extracting imaging imperfections on the basis of imaging tool specific intensity measurements and simulations | Stefan Roling, Francois Weisbuch | 2012-12-11 |
| 8155770 | Method and apparatus for dispatching workpieces to tools based on processing and performance history | Robert Barlovic, Uwe Schulze, Jan Raebiger, Joerg Weigang, Jens Busch | 2012-04-10 |
| 8039181 | Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario | Jens Busch, Uwe Schulze | 2011-10-18 |
| 7842442 | Method and system for reducing overlay errors within exposure fields by APC control strategies | Bernd Schulz, Fritjof Hempel, Uwe Schulze | 2010-11-30 |
| 7618755 | Method and system for automatically detecting exposed substrates having a high probability for defocused exposure fields | Uwe Schulze, Jens Krause | 2009-11-17 |
| 7325224 | Method and system for increasing product yield by controlling lithography on the basis of electrical speed data | Heiko Wagner, Rolf Stephan | 2008-01-29 |
| 7006195 | Method and system for improving exposure uniformity in a step and repeat process | Jan Raebiger, Heiko Wagner, Uwe Schulze | 2006-02-28 |
| 6946411 | Method and system for improving the efficiency of a mechanical alignment tool | Uwe Knappe, Jan Raebiger, Uwe Schulze | 2005-09-20 |
| 6493063 | Critical dimension control improvement method for step and scan photolithography | Anna M. Minvielle | 2002-12-10 |
| 5936713 | Method and device for producing features on a photolithographic layer | Jorg Paufler, Heinz Kück | 1999-08-10 |
| 5496669 | System for detecting a latent image using an alignment apparatus | Rainer Pforr, Steve Wittekoek | 1996-03-05 |