| 9966315 |
Advanced process control methods for process-aware dimension targeting |
Philipp Jaschinsky, Frank Kahlenberg, Sirko Kramp, Roberto Schiwon |
2018-05-08 |
| 8605250 |
Method and system for detecting particle contamination in an immersion lithography tool |
Rene Wirtz |
2013-12-10 |
| 8332783 |
Control of critical dimensions in optical imaging processes for semiconductor production by extracting imaging imperfections on the basis of imaging tool specific intensity measurements and simulations |
Stefan Roling, Francois Weisbuch |
2012-12-11 |
| 8155770 |
Method and apparatus for dispatching workpieces to tools based on processing and performance history |
Robert Barlovic, Uwe Schulze, Jan Raebiger, Joerg Weigang, Jens Busch |
2012-04-10 |
| 8039181 |
Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario |
Jens Busch, Uwe Schulze |
2011-10-18 |
| 7842442 |
Method and system for reducing overlay errors within exposure fields by APC control strategies |
Bernd Schulz, Fritjof Hempel, Uwe Schulze |
2010-11-30 |
| 7618755 |
Method and system for automatically detecting exposed substrates having a high probability for defocused exposure fields |
Uwe Schulze, Jens Krause |
2009-11-17 |
| 7325224 |
Method and system for increasing product yield by controlling lithography on the basis of electrical speed data |
Heiko Wagner, Rolf Stephan |
2008-01-29 |
| 7006195 |
Method and system for improving exposure uniformity in a step and repeat process |
Jan Raebiger, Heiko Wagner, Uwe Schulze |
2006-02-28 |
| 6946411 |
Method and system for improving the efficiency of a mechanical alignment tool |
Uwe Knappe, Jan Raebiger, Uwe Schulze |
2005-09-20 |
| 6493063 |
Critical dimension control improvement method for step and scan photolithography |
Anna M. Minvielle |
2002-12-10 |
| 5936713 |
Method and device for producing features on a photolithographic layer |
Jorg Paufler, Heinz Kück |
1999-08-10 |
| 5496669 |
System for detecting a latent image using an alignment apparatus |
Rainer Pforr, Steve Wittekoek |
1996-03-05 |
