Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8155770 | Method and apparatus for dispatching workpieces to tools based on processing and performance history | Robert Barlovic, Uwe Schulze, Joerg Weigang, Jens Busch, Rolf Seltmann | 2012-04-10 |
| 7346407 | Method of operating an advanced process controller by dynamically adapting hierarchy levels | Heiko Wagner | 2008-03-18 |
| 7299105 | Method and system for controlling a product parameter of a circuit element | Andre Holfeld, Lutz Herrmann | 2007-11-20 |
| 7268000 | Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step | Dirk Wollstein, Gerd Marxsen | 2007-09-11 |
| 7041434 | Technique for enhancing accuracy of critical dimensions of a gate electrode by using characteristics of an ARC layer | Andre Holfeld | 2006-05-09 |
| 7006195 | Method and system for improving exposure uniformity in a step and repeat process | Heiko Wagner, Uwe Schulze, Rolf Seltmann | 2006-02-28 |
| 6946411 | Method and system for improving the efficiency of a mechanical alignment tool | Uwe Knappe, Uwe Schulze, Rolf Seltmann | 2005-09-20 |
| 6879871 | Advanced process control for a manufacturing process of a plurality of products with minimized control degradation after re-initialization upon occurrence of reset events | Gunter Grasshoff, Andre Holfeld | 2005-04-12 |
| 6821859 | Method and system for controlling an electrical property of a field effect transistor | Andre Holfeld, Dirk Wollstein | 2004-11-23 |
| 6096628 | Method of controlling effective channel length of semiconductor device by non-doping implantation at elevated energies | David C. Greenlaw | 2000-08-01 |