| 8155770 |
Method and apparatus for dispatching workpieces to tools based on processing and performance history |
Robert Barlovic, Uwe Schulze, Joerg Weigang, Jens Busch, Rolf Seltmann |
2012-04-10 |
| 7346407 |
Method of operating an advanced process controller by dynamically adapting hierarchy levels |
Heiko Wagner |
2008-03-18 |
| 7299105 |
Method and system for controlling a product parameter of a circuit element |
Andre Holfeld, Lutz Herrmann |
2007-11-20 |
| 7268000 |
Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step |
Dirk Wollstein, Gerd Marxsen |
2007-09-11 |
| 7041434 |
Technique for enhancing accuracy of critical dimensions of a gate electrode by using characteristics of an ARC layer |
Andre Holfeld |
2006-05-09 |
| 7006195 |
Method and system for improving exposure uniformity in a step and repeat process |
Heiko Wagner, Uwe Schulze, Rolf Seltmann |
2006-02-28 |
| 6946411 |
Method and system for improving the efficiency of a mechanical alignment tool |
Uwe Knappe, Uwe Schulze, Rolf Seltmann |
2005-09-20 |
| 6879871 |
Advanced process control for a manufacturing process of a plurality of products with minimized control degradation after re-initialization upon occurrence of reset events |
Gunter Grasshoff, Andre Holfeld |
2005-04-12 |
| 6821859 |
Method and system for controlling an electrical property of a field effect transistor |
Andre Holfeld, Dirk Wollstein |
2004-11-23 |
| 6096628 |
Method of controlling effective channel length of semiconductor device by non-doping implantation at elevated energies |
David C. Greenlaw |
2000-08-01 |
