Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12253472 | System and method for detecting a defect in a specimen | Richard P. Good, Roberto Schiwon, Matthias Ruhm | 2025-03-18 |
| 8323471 | Automatic deposition profile targeting | Thomas Ortleb, Markus Nopper | 2012-12-04 |
| 8147670 | Profile control on ring anode plating chambers for multi-step recipes | Sylvia Boehlmann, Susanne Wehner | 2012-04-03 |
| 7268000 | Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step | Jan Raebiger, Gerd Marxsen | 2007-09-11 |
| 6936480 | Method of controlling the chemical mechanical polishing of stacked layers having a surface topology | Stefan Lingel, Jan Räbiger | 2005-08-30 |
| 6821859 | Method and system for controlling an electrical property of a field effect transistor | Jan Raebiger, Andre Holfeld | 2004-11-23 |