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System and method for detecting a defect in a specimen |
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Automatic deposition profile targeting |
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2012-12-04 |
| 8147670 |
Profile control on ring anode plating chambers for multi-step recipes |
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2012-04-03 |
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Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step |
Jan Raebiger, Gerd Marxsen |
2007-09-11 |
| 6936480 |
Method of controlling the chemical mechanical polishing of stacked layers having a surface topology |
Stefan Lingel, Jan Räbiger |
2005-08-30 |
| 6821859 |
Method and system for controlling an electrical property of a field effect transistor |
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2004-11-23 |