Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6936480 | Method of controlling the chemical mechanical polishing of stacked layers having a surface topology | Dirk Wollstein, Stefan Lingel | 2005-08-30 | $5,346,000 |