Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12253472 | System and method for detecting a defect in a specimen | Richard P. Good, Roberto Schiwon, Dirk Wollstein | 2025-03-18 |
| 10115621 | Method for in-die overlay control using FEOL dummy fill layer | Peter Moll, Martin Schmidt, Carsten Hartig, Stefan Thierbach, Stefan Rongen +3 more | 2018-10-30 |
| 9091943 | Asymmetric reticle heating of multilayer reticles eliminated by dummy exposures and related methods | Arthur Hotzel, Eric Cotte | 2015-07-28 |
| 8648997 | Member with a cleaning surface and a method of removing contamination | Marcus Theodoor Wilhelmus Van Der Heijden, Mark Drewes Boerema, Mario Putz | 2014-02-11 |