Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115621 | Method for in-die overlay control using FEOL dummy fill layer | Martin Schmidt, Carsten Hartig, Matthias Ruhm, Stefan Thierbach, Stefan Rongen +3 more | 2018-10-30 |
| 9761689 | Method of forming a semiconductor device and according semiconductor device | Dominic Thurmer, Hans-Juergen Thees, Kai Frohberg, Heike Scholz | 2017-09-12 |
| 9196684 | Tensile nitride profile shaper etch to provide void free gapfill | Kai Frohberg, Dominik Olligs, Heike Scholz | 2015-11-24 |
| 9159661 | Integrated circuits with close electrical contacts and methods for fabricating the same | Kai Frohberg, Heike Scholz | 2015-10-13 |
| 8003538 | Method for producing a structure on the surface of a substrate | Christoph Nolscher, Dietmar Temmler | 2011-08-23 |
| 7863149 | Method for fabricating a capacitor | Srivatsa Kundalgurki, Dirk Manger, Kristin Schupke, Till Schloesser | 2011-01-04 |
| 7776759 | Methods for forming an integrated circuit, including openings in a mold layer from nanowires or nanotubes | Peter Lahnor, Odo Wunnicke, Johannes Heitmann, Andreas Orth | 2010-08-17 |
| 7687343 | Storage capacitor, a memory device and a method of manufacturing the same | Peter Baars, Till Schloesser, Rolf Weis, Klaus Muemmler | 2010-03-30 |
| 7615444 | Method for forming a capacitor structure | Odo Wunnicke, Kristin Schupke | 2009-11-10 |
| 7544562 | Method for manufacturing a capacitor electrode structure | Odo Wunnicke | 2009-06-09 |
| 7456461 | Stacked capacitor array and fabrication method for a stacked capacitor array | Martin Gutsche, Harald Seidl | 2008-11-25 |
| 7449739 | Storage capacitor for semiconductor memory cells and method of manufacturing a storage capacitor | Johannes Heitmann, Odo Wunnicke, Till Schloesser | 2008-11-11 |
| 7413951 | Stacked capacitor and method for producing stacked capacitors for dynamic memory cells | Stephan Kudelka, Stefan Jakschik, Odo Wunnicke | 2008-08-19 |
| 7368385 | Method for producing a structure on the surface of a substrate | Christoph Nolscher, Dietmar Temmler | 2008-05-06 |
| 6780337 | Method for trench etching | Matthias Goldbach | 2004-08-24 |
| 6774005 | Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide | Martin Gutsche, Bernhard Sell, Annette Sanger, Harald Seidl | 2004-08-10 |
| 6541372 | Method for manufacturing a conductor structure for an integrated circuit | Stephan Wege | 2003-04-01 |
| 6068945 | Battery | — | 2000-05-30 |