Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897564 | Systems and methods for detecting change in species in an environment | — | 2018-02-20 |
| 9663356 | Etch release residue removal using anhydrous solution | Ruben B. Montez, Gary Pfeffer | 2017-05-30 |
| 9658180 | Systems and methods for detecting change in species in an environment | — | 2017-05-23 |
| 9658199 | Systems and methods for detecting change in species in an environment | — | 2017-05-23 |
| 9583665 | PIN diode with nanoclusters | — | 2017-02-28 |
| 8993451 | Etching trenches in a substrate | James F. McHugh | 2015-03-31 |
| 8709848 | Method for etched cavity devices | Scott A. Dye | 2014-04-29 |
| 7863149 | Method for fabricating a capacitor | Peter Moll, Dirk Manger, Kristin Schupke, Till Schloesser | 2011-01-04 |
| 7579253 | Method for cleaning a semiconductor wafer | — | 2009-08-25 |
| 7319223 | Method and apparatus for characterizing a recess located on a surface of a substrate | — | 2008-01-15 |
| 7284558 | Enhanced megasonic based clean using an alternative cleaning chemistry | — | 2007-10-23 |
| 7259061 | Method for forming a capacitor for an integrated circuit and integrated circuit | — | 2007-08-21 |
| 7208095 | Method for fabricating bottom electrodes of stacked capacitor memory cells and method for cleaning and drying a semiconductor wafer | — | 2007-04-24 |
| 7084029 | Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor | Dietmar Temmler, Hans-Peter Moll, Joerg Wiedemann | 2006-08-01 |
| 7018893 | Method for fabricating bottom electrodes of stacked capacitor memory cells | — | 2006-03-28 |
| 7005385 | Method for removing a resist mask with high selectivity to a carbon hard mask used for semiconductor structuring | — | 2006-02-28 |