Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003538 | Method for producing a structure on the surface of a substrate | Christoph Nolscher, Peter Moll | 2011-08-23 |
| 7834395 | 3-D channel field-effect transistor, memory cell and integrated circuit | Alexander Sieck | 2010-11-16 |
| 7535044 | Semiconductor device, method for manufacturing a semiconductor device and mask for manufacturing a semiconductor device | Christoph Noelscher | 2009-05-19 |
| 7410864 | Trench and a trench capacitor and method for forming the same | — | 2008-08-12 |
| 7368385 | Method for producing a structure on the surface of a substrate | Christoph Nolscher, Peter Moll | 2008-05-06 |
| 7294902 | Trench isolation having a self-adjusting surface seal and method for producing one such trench isolation | Andreas Wich-Glasen | 2007-11-13 |
| 7265025 | Method for filling trench and relief geometries in semiconductor structures | Barbara Lorenz, Daniel Koehler, Matthias Foerster | 2007-09-04 |
| 7250336 | Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure | Jörn Regul | 2007-07-31 |
| 7223651 | Dram memory cell with a trench capacitor and method for production thereof | Frank Richter, Andreas Wich-Glasen | 2007-05-29 |
| 7152461 | Method and apparatus for determination of the depth of depressions which are formed in a mount substrate | Peter Weidner | 2006-12-26 |
| 7119384 | Field effect transistor and method for fabricating it | Martin Popp, Frank Richter, Andreas Wich-Glasen | 2006-10-10 |
| 7084029 | Method for fabricating a hole trench storage capacitor in a semiconductor substrate, and hole trench storage capacitor | Srivatsa Kundalgurki, Hans-Peter Moll, Joerg Wiedemann | 2006-08-01 |
| 7049647 | Semiconductor memory cell with trench capacitor and selection transistor and method for fabricating it | Wolfram Karcher, Martin Schrems | 2006-05-23 |
| 7012289 | Memory cell having a thin insulation collar and memory module | Martin Popp | 2006-03-14 |
| 6989311 | Method for fabricating a trench contact to a deep trench capacitor having a polysilicon filling | Martin Schrems, Andreas Wich-Glasen | 2006-01-24 |
| 6924225 | Method for producing an electrically conductive contact | Martin Popp | 2005-08-02 |
| 6841443 | Method for fabricating a deep trench capacitor for dynamic memory cells | Anke Krasemann | 2005-01-11 |
| 6828192 | Semiconductor memory cell and method for fabricating the memory cell | Wolfgang Gustin, Ulrike Grüning-Von Schwerin, Martin Schrems, Stefan Rongen, Rudolf Strasser | 2004-12-07 |
| 6821863 | Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer | Martin Popp, Kristin Schupke, Uwe Schilling, Kerstin Pomplun | 2004-11-23 |
| 6773983 | Memory cell arrangement and method for its fabrication | Frank Richter | 2004-08-10 |
| 6664167 | Memory with trench capacitor and selection transistor and method for fabricating it | Herbert Benzinger, Wolfram Karcher, Catharina Pusch, Martin Schrems, Jurgen Faul | 2003-12-16 |
| 6590249 | One-transistor memory cell configuration and method for its fabrication | Karl-Heinz Kusters | 2003-07-08 |
| 6326262 | Method for fabricating epitaxy layer | Herbert Benzinger, Wolfram Karcher, Catharina Pusch, Martin Schrems, Jurgen Faul | 2001-12-04 |