Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12043539 | Sensor system with a microelectromechanical sensor element and method for producing a sensor system | Dirk Meinhold, Steffen Bieselt, Claudia HENGST, Erhard Landgraf, Sebastian PREGL | 2024-07-23 |
| 7858514 | Integrated circuit, intermediate structure and a method of fabricating a semiconductor structure | Ulrike Roessner, Ilona Juergensen, Mirko Vogt | 2010-12-28 |
| 7566611 | Manufacturing method for an integrated semiconductor structure | Peter Baars, Klaus Muemmler, Stefan Tegen, Joern Regul | 2009-07-28 |
| 7265025 | Method for filling trench and relief geometries in semiconductor structures | Dietmar Temmler, Barbara Lorenz, Matthias Foerster | 2007-09-04 |
| 6827332 | Solenoid valve | Juergen Hanneke | 2004-12-07 |
| 6740595 | Etch process for recessing polysilicon in trench structures | Stephan Kudelka, Helmut Tews, Alexander Michaelis, Uwe Schroeder, Martin Popp +1 more | 2004-05-25 |
| 4356901 | Support for a series of friction discs | Walter O. Zajac | 1982-11-02 |

