Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332271 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann +1 more | 2025-06-17 |
| 12137500 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Thoralf Kautzsch, Heiko Froehlich, Uwe Rudolph, Alessia Scire, Maik Stegemann | 2024-11-05 |
| 11594654 | Method of generating a germanium structure and optical device comprising a germanium structure | Andre Roeth, Henning Feick, Heiko Froehlich, Thoralf Kautzsch, Olga Khvostikova +3 more | 2023-02-28 |
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann +1 more | 2022-08-23 |
| 11393714 | Producing a buried cavity in a semiconductor substrate | Andre Roeth, Boris Binder, Thoralf Kautzsch, Uwe Rudolph, Maik Stegemann | 2022-07-19 |
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann | 2021-08-03 |
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Maik Stegemann, Andre Roeth +4 more | 2020-12-22 |
| 10700221 | Microlens having a carrier-free optical interference filter | Ines Uhlig, Anjo Kirschner, Dirk Offenberg, Beatrice Poetschick, Bjoern Sausner +1 more | 2020-06-30 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Andre Roeth, Maik Stegemann +1 more | 2020-06-16 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann | 2020-06-16 |
| 10681777 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Thoralf Kautzsch, Heiko Froehlich, Uwe Rudolph, Alessia Scire, Maik Stegemann | 2020-06-09 |
| 10544037 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2020-01-28 |
| 10386255 | Pressure sensor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Marco Haubold, Andre Roeth, Maik Stegemann | 2019-08-20 |
| 10347778 | Graded-index structure for optical systems | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann | 2019-07-09 |
| 10290805 | Emitter and method for manufacturing the same | Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann | 2019-05-14 |
| 10084101 | Graded-index structure for optical systems | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann | 2018-09-25 |
| 10060816 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann, Andre Roeth, Bernhard Winkler +1 more | 2018-08-28 |
| 9896329 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2018-02-20 |
| 9887355 | Emitter and method for manufacturing the same | Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann | 2018-02-06 |
| 9752943 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann, Andre Röth, Bernhard Winkler +1 more | 2017-09-05 |
| 9663355 | Method and structure for creating cavities with extreme aspect ratios | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann | 2017-05-30 |
| 9641153 | Method of forming a resonator | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann, Thomas Santa, Markus Burian | 2017-05-02 |
| 9546923 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Heiko Fröhlich, Maik Stegemann, Andre Röth, Bernhard Winkler +1 more | 2017-01-17 |
| 9452923 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann | 2016-09-27 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Maik Stegemann, Boris Binder, Steffen Bieselt | 2016-07-05 |