Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9641153 | Method of forming a resonator | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Thomas Santa | 2017-05-02 |
| 9209778 | Microelectromechanical resonators | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Thomas Santa | 2015-12-08 |