Issued Patents All Time
Showing 1–25 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332271 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2025-06-17 |
| 12137500 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Heiko Froehlich, Uwe Rudolph, Alessia Scire, Maik Stegemann, Mirko Vogt | 2024-11-05 |
| 11594654 | Method of generating a germanium structure and optical device comprising a germanium structure | Andre Roeth, Henning Feick, Heiko Froehlich, Olga Khvostikova, Stefano Parascandola +3 more | 2023-02-28 |
| 11428661 | Method for producing a moisture sensor at the wafer level and moisture sensor | Marco Haubold, Heiko Froehlich, Olga Khvostikova, Marten Oldsen, Bernhard Straub | 2022-08-30 |
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2022-08-23 |
| 11393714 | Producing a buried cavity in a semiconductor substrate | Andre Roeth, Boris Binder, Uwe Rudolph, Maik Stegemann, Mirko Vogt | 2022-07-19 |
| 11239375 | Method for manufacturing a pressure sensitive field effect transistor including a membrane structure | Vladislav Komenko, Heiko Froehlich, Andrey Kravchenko, Bernhard Winkler | 2022-02-01 |
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2021-08-03 |
| 11041757 | Tunable Fabry-Perot filter element, spectrometer device and method for manufacturing a tunable Fabry-Perot filter element | — | 2021-06-22 |
| 11015980 | Infrared radiation sensors and methods of manufacturing infrared radiation sensors | Vladislav Komenko, Heiko Froehlich, Andrey Kravchenko | 2021-05-25 |
| 10948513 | Electronic device having a first electrode formed on a movable suspended mass opposing a second electrode formed on a cover layer | — | 2021-03-16 |
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Mirko Vogt, Maik Stegemann, Andre Roeth +4 more | 2020-12-22 |
| 10707362 | Controlling of photo-generated charge carriers | Thomas Bever, Henning Feick, Dirk Offenberg, Stefano Parascandola, Ines Uhlig +2 more | 2020-07-07 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2020-06-16 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2020-06-16 |
| 10681777 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Heiko Froehlich, Uwe Rudolph, Alessia Scire, Maik Stegemann, Mirko Vogt | 2020-06-09 |
| 10604405 | Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxy | — | 2020-03-31 |
| 10580663 | Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure | Steffen Bieselt, Alessia Scire | 2020-03-03 |
| 10544037 | Integrated semiconductor device and manufacturing method | Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler, Andre Roeth +2 more | 2020-01-28 |
| 10539587 | Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies | Steffen Bieselt | 2020-01-21 |
| 10483426 | Photo cell devices for phase-sensitive detection of light signals | — | 2019-11-19 |
| 10453985 | Integrated light emitting device, integrated sensor device, and manufacturing method | — | 2019-10-22 |
| 10386255 | Pressure sensor device and manufacturing method | Heiko Froehlich, Marco Haubold, Andre Roeth, Maik Stegemann, Mirko Vogt | 2019-08-20 |
| 10354911 | Silicon on nothing devices and methods of formation thereof | Alessia Scire, Steffen Bieselt | 2019-07-16 |
| 10347778 | Graded-index structure for optical systems | Heiko Froehlich, Maik Stegemann, Mirko Vogt | 2019-07-09 |