| 12332271 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device |
Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt +1 more |
2025-06-17 |
| 11594654 |
Method of generating a germanium structure and optical device comprising a germanium structure |
Henning Feick, Heiko Froehlich, Thoralf Kautzsch, Olga Khvostikova, Stefano Parascandola +3 more |
2023-02-28 |
| 11422151 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device |
Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt +1 more |
2022-08-23 |
| 11393714 |
Producing a buried cavity in a semiconductor substrate |
Boris Binder, Thoralf Kautzsch, Uwe Rudolph, Maik Stegemann, Mirko Vogt |
2022-07-19 |
| 11078072 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process |
Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt |
2021-08-03 |
| 10870575 |
Stressed decoupled micro-electro-mechanical system sensor |
Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann +4 more |
2020-12-22 |
| 10683203 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process |
Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt |
2020-06-16 |
| 10684306 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device |
Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt +1 more |
2020-06-16 |
| 10544037 |
Integrated semiconductor device and manufacturing method |
Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more |
2020-01-28 |
| 10386255 |
Pressure sensor device and manufacturing method |
Thoralf Kautzsch, Heiko Froehlich, Marco Haubold, Maik Stegemann, Mirko Vogt |
2019-08-20 |
| 10060816 |
Sensor structures, systems and methods with improved integration and optimized footprint |
Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Bernhard Winkler +1 more |
2018-08-28 |
| 9896329 |
Integrated semiconductor device and manufacturing method |
Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more |
2018-02-20 |
