Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332271 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt +1 more | 2025-06-17 |
| 11594654 | Method of generating a germanium structure and optical device comprising a germanium structure | Henning Feick, Heiko Froehlich, Thoralf Kautzsch, Olga Khvostikova, Stefano Parascandola +3 more | 2023-02-28 |
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt +1 more | 2022-08-23 |
| 11393714 | Producing a buried cavity in a semiconductor substrate | Boris Binder, Thoralf Kautzsch, Uwe Rudolph, Maik Stegemann, Mirko Vogt | 2022-07-19 |
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt | 2021-08-03 |
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann +4 more | 2020-12-22 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt | 2020-06-16 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt +1 more | 2020-06-16 |
| 10544037 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2020-01-28 |
| 10386255 | Pressure sensor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Marco Haubold, Maik Stegemann, Mirko Vogt | 2019-08-20 |
| 10060816 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Bernhard Winkler +1 more | 2018-08-28 |
| 9896329 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2018-02-20 |