Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332271 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Steffen Bieselt, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2025-06-17 |
| 12137500 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Thoralf Kautzsch, Uwe Rudolph, Alessia Scire, Maik Stegemann, Mirko Vogt | 2024-11-05 |
| 11754522 | Moisture sensor | Andrey Kravchenko, Magali Glemet, Vladislav Komenko | 2023-09-12 |
| 11594654 | Method of generating a germanium structure and optical device comprising a germanium structure | Andre Roeth, Henning Feick, Thoralf Kautzsch, Olga Khvostikova, Stefano Parascandola +3 more | 2023-02-28 |
| 11486848 | Moisture sensor | Andrey Kravchenko, Magali Glemet, Vladislav Komenko | 2022-11-01 |
| 11428661 | Method for producing a moisture sensor at the wafer level and moisture sensor | Marco Haubold, Thoralf Kautzsch, Olga Khvostikova, Marten Oldsen, Bernhard Straub | 2022-08-30 |
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Steffen Bieselt, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2022-08-23 |
| 11239375 | Method for manufacturing a pressure sensitive field effect transistor including a membrane structure | Vladislav Komenko, Thoralf Kautzsch, Andrey Kravchenko, Bernhard Winkler | 2022-02-01 |
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Andre Roeth, Maik Stegemann, Mirko Vogt | 2021-08-03 |
| 11015980 | Infrared radiation sensors and methods of manufacturing infrared radiation sensors | Vladislav Komenko, Thoralf Kautzsch, Andrey Kravchenko | 2021-05-25 |
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann +4 more | 2020-12-22 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Andre Roeth, Maik Stegemann, Mirko Vogt | 2020-06-16 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Thoralf Kautzsch, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2020-06-16 |
| 10681777 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Thoralf Kautzsch, Uwe Rudolph, Alessia Scire, Maik Stegemann, Mirko Vogt | 2020-06-09 |
| 10544037 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Alessia Scire, Maik Stegemann, Bernhard Winkler, Andre Roeth +2 more | 2020-01-28 |
| 10386255 | Pressure sensor device and manufacturing method | Thoralf Kautzsch, Marco Haubold, Andre Roeth, Maik Stegemann, Mirko Vogt | 2019-08-20 |
| 10347778 | Graded-index structure for optical systems | Thoralf Kautzsch, Maik Stegemann, Mirko Vogt | 2019-07-09 |
| 10290805 | Emitter and method for manufacturing the same | Steffen Bieselt, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt | 2019-05-14 |
| 10084101 | Graded-index structure for optical systems | Thoralf Kautzsch, Maik Stegemann, Mirko Vogt | 2018-09-25 |
| 10060816 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Andre Roeth, Bernhard Winkler +1 more | 2018-08-28 |
| 9938133 | System and method for a comb-drive MEMS device | Thoralf Kautzsch, Mohsin Nawaz, Alfons Dehe, Alessia Scire, Steffen Bieselt | 2018-04-10 |
| 9896329 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Alessia Scire, Maik Stegemann, Bernhard Winkler, Andre Roeth +2 more | 2018-02-20 |
| 9887355 | Emitter and method for manufacturing the same | Steffen Bieselt, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt | 2018-02-06 |
| 9752943 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Andre Röth, Bernhard Winkler +1 more | 2017-09-05 |
| 9663355 | Method and structure for creating cavities with extreme aspect ratios | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann | 2017-05-30 |