Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12415719 | MEMS sensor with particle filter and method for producing it | Andre Brockmeier, Barbara Angela Glanzer, Francesco Solazzi, Carsten von Koblinski | 2025-09-16 |
| 12188839 | Sensor device including sensor unit for a gaseous medium | Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Karolina Zogal | 2025-01-07 |
| 11774308 | Sensor device including sensor unit for a gaseous medium | Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Karolina Zogal | 2023-10-03 |
| 11703681 | MEMS devices comprising spring element and comb drive and associated production methods | Stephan Gerhard Albert | 2023-07-18 |
| 11428661 | Method for producing a moisture sensor at the wafer level and moisture sensor | Marco Haubold, Heiko Froehlich, Thoralf Kautzsch, Olga Khvostikova, Bernhard Straub | 2022-08-30 |
| 10859457 | Sensor device including sensor unit for a gaseous medium | Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Karolina Zogal | 2020-12-08 |
| 9726561 | Differential pressure sensor with a capacitive read out system | Willem Frederik Adrianus Besling, Iris Bominaar-Silkens, Remco Henricus Wilhelmus Pijnenburg | 2017-08-08 |
| 9670057 | Sensor device and method for making thereof | — | 2017-06-06 |
| 9557238 | Pressure sensor with geter embedded in membrane | Willem Frederik Adrianus Besling, Martijn Goossens, Peter Gerard Steeneken, Remco Henricus Wilhelmus Pijnenburg, Casper van der Avoort | 2017-01-31 |
| 9385099 | Die interconnect | Leonardus Antonius Elisabeth van Gemert, Coenraad Cornelis Tak, Hendrik Bouman | 2016-07-05 |
| 9340412 | Suspended membrane for capacitive pressure sensor | Willem Frederik Adrianus Besling, Remco Henricus Wilhelmus Pijnenburg, Casper van der Avoort, Martijn Goossens | 2016-05-17 |
| 8546928 | Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof | Peter Merz, Wolfgang Reinert, Oliver Schwarzelbach | 2013-10-01 |
| 8526098 | Microsystem and method for the production of a microsystem | Ulrich Hofmann, Hans-Joachim Quenzer | 2013-09-03 |
| 8517545 | Cover for microsystems and method for producing a cover | Hans-Joachim Quenzer, Ulrich Hofmann | 2013-08-27 |
| 8213066 | Electrostatic comb-drive micromechanical actuator | Ulrich Hofmann, Bernd Wagner | 2012-07-03 |
| 8201452 | Housing for micro-mechanical and micro-optical components used in mobile applications | Ulrich Hofmann | 2012-06-19 |
| 8169678 | Micro-mirror actuator having encapsulation capability and method for the production thereof | Ulrich Hofmann | 2012-05-01 |
| 8039950 | Solder material lining a cover wafer attached to wafer substrate | Wolfgang Reinert, Peter Merz | 2011-10-18 |
| 7410828 | Method of creating a predefined internal pressure within a cavity of a semiconductor device | Hans-Joachim Quenzer, Peter Merz, Wolfgang Reinert | 2008-08-12 |