Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8549921 | Sensor for detecting acceleration | Manfred Weiss, Volker Kempe | 2013-10-08 |
| 8546928 | Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof | Peter Merz, Wolfgang Reinert, Marten Oldsen | 2013-10-01 |
| 7520169 | Angular rate sensor featuring mechanically decoupled oscillation modes | — | 2009-04-21 |