Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283930 | Method of producing a cap substrate, and packaged radiation-emitting device | Hans-Joachim Quenzer | 2019-05-07 |
| 10002896 | Housing for an infrared radiation micro device and method for fabricating such housing | Jochen Quenzer, Sebastien Tinnes, Cécile Roman | 2018-06-19 |
| 9912115 | Method of producing a cap substrate, and packaged radiation-emitting device | Hans-Joachim Quenzer | 2018-03-06 |
| 9761740 | Electromagnetic radiation micro device, wafer element and method for manufacturing such a micro device | — | 2017-09-12 |
| 9637377 | Method for forming a micro-surface structure and for producing a micro-electromechanical component | Jochen Quenzer, Kai Gruber, Stephan Warnat | 2017-05-02 |
| 8590376 | Microelectromechanical inertial sensor with atmospheric damping | Martin Heller | 2013-11-26 |
| 8546928 | Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof | Peter Merz, Marten Oldsen, Oliver Schwarzelbach | 2013-10-01 |
| 8129838 | Housed active microstructures with direct contacting to a substrate | — | 2012-03-06 |
| 8039950 | Solder material lining a cover wafer attached to wafer substrate | Marten Oldsen, Peter Merz | 2011-10-18 |
| 7781331 | Method for producing electrically conductive bushings through non-conductive or semiconductive substrates | — | 2010-08-24 |
| 7739900 | Method for testing the leakage rate of vacuum encapsulated devices | Dirk Kaehler, Peter Merz | 2010-06-22 |
| 7410828 | Method of creating a predefined internal pressure within a cavity of a semiconductor device | Hans-Joachim Quenzer, Peter Merz, Marten Oldsen | 2008-08-12 |
| 7286294 | Beam-shaping element for optical radiation and a method for producing said element | Hans-Joachim Quenzer | 2007-10-23 |