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Method of manufacturing a semiconductor transducer device with multilayer diaphragm and semiconductor transducer device with multilayer diaphragm |
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Willem Frederik Adrianus Besling, Casper van der Avoort, Coenraad Cornelis Tak, Olaf Wunnicke, Hendrik Bouman |
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Semiconductor transducer device with multilayer diaphragm and method of manufacturing a semiconductor transducer device with multilayer diaphragm |
Alessandro Faes, Jörg Siegert, Willem Frederik Adrianus Besling |
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Kailash Vijayakumar, Willem Frederik Adrianus Besling, Sophie Guillemin, Jörg Siegert |
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Capacitive pressure with Ti electrode |
Willem Frederik Adrianus Besling, Kailash Vijayakumar, Jörg Siegert, Alessandro Faes |
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Attachment of stress sensitive integrated circuit dies |
Casper van der Avoort, Willem Frederik Adrianus Besling, Olaf Wunnicke, Coen Tak |
2023-01-10 |
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Method for manufacturing an integrated MEMS transducer device and integrated MEMS transducer device |
Kailash Vijayakumar, Willem Frederik Adrianus Besling, Sophie Guillemin, Jörg Siegert |
2022-11-08 |
| 11454562 |
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Alberto Maccioni, Willem Frederik Adrianus Besling, Olaf Wunnicke, Casper van der Avoort, Anderson Singulani |
2022-09-27 |
| 11427465 |
Capacitive sensors having temperature stable output |
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Semiconductor device and method for forming a semiconductor device |
Willem Frederik Adrianus Besling, Casper van der Avoort, Coenraad Cornelis Tak, Olaf Wunnicke, Martijn Goossens |
2022-06-21 |
| 11293821 |
Pressure sensor module |
Roel Daamen, Kailash Vijayakumar, Hendrik Bouman, Twan Van Lippen |
2022-04-05 |
| 11248976 |
Capacitive pressure sensors and other devices having a suspended membrane and having rounded corners at an anchor edge |
Willem Frederik Adrianus Besling, Casper van der Avoort, Olaf Wunnicke, Jörg Siegert, Alessandro Faes |
2022-02-15 |
| 11001495 |
Sensor package and method of producing the sensor package |
Willem Frederik Adrianus Besling, Casper van der Avoort, Coenraad Cornelis Tak, Olaf Wunnicke, Hendrik Bouman |
2021-05-11 |
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Method and apparatus for calibrating pressure sensor integrated circuit devices |
Willem Frederik Adrianus Besling, Casper van der Avoort, Martijn Goossens |
2019-10-15 |
| 9726561 |
Differential pressure sensor with a capacitive read out system |
Willem Frederik Adrianus Besling, Iris Bominaar-Silkens, Marten Oldsen |
2017-08-08 |
| 9557238 |
Pressure sensor with geter embedded in membrane |
Willem Frederik Adrianus Besling, Martijn Goossens, Peter Gerard Steeneken, Marten Oldsen, Casper van der Avoort |
2017-01-31 |
| 9513184 |
MEMS device calibration |
Martijn Goossens, Willem Frederik Adrianus Besling, Peter Gerard Steeneken, Casper van der Avoort |
2016-12-06 |
| 9344805 |
Micro-electromechanical system microphone |
Franz Felberer, Twan Van Lippen, Iris Bominaar-Silkens |
2016-05-17 |
| 9340412 |
Suspended membrane for capacitive pressure sensor |
Willem Frederik Adrianus Besling, Casper van der Avoort, Marten Oldsen, Martijn Goossens |
2016-05-17 |
| 9318913 |
Method of controlling a power transfer system and power transfer system |
Bruno Motte, Peter C. S. Scholtens |
2016-04-19 |
| 9307319 |
Sensor circuit and calibration method |
Klaus Reimann, Twan Van Lippen, Iris Bominaar-Silkens, Robert Hendrikus Margaretha van Veldhoven |
2016-04-05 |
| 8913766 |
Acoustic transducers with perforated membranes |
Iris Bominaar-Silkens, Andres Felipe Vasquez Quintero, Klaus Reimann, Twan Van Lippen |
2014-12-16 |
| 8906534 |
Stacked multi-cell battery concept |
Romano Hoofman, Aurelie Humbert, Matthias Merz, Youri Victorovitch Ponomarev, Gilberto Curatola |
2014-12-09 |
| 8901682 |
Acoustic transducers with perforated membranes |
Klaus Reimann, Iris Bominaar-Silkens, Twan Van Lippen |
2014-12-02 |
| 8822254 |
MEMS device and manufacturing method |
Jozef Thomas Martinus van Beek, Klaus Reimann, Twan Van Lippen |
2014-09-02 |
