| 12191402 |
Method of manufacturing a semiconductor transducer device with multilayer diaphragm and semiconductor transducer device with multilayer diaphragm |
Jörg Siegert, Willem Frederik Adrianus Besling, Remco Henricus Wilhelmus Pijnenburg |
2025-01-07 |
| 11946822 |
Semiconductor transducer device with multilayer diaphragm and method of manufacturing a semiconductor transducer device with multilayer diaphragm |
Jörg Siegert, Willem Frederik Adrianus Besling, Remco Henricus Wilhelmus Pijnenburg |
2024-04-02 |
| 11585711 |
Capacitive pressure with Ti electrode |
Willem Frederik Adrianus Besling, Remco Henricus Wilhelmus Pijnenburg, Kailash Vijayakumar, Jörg Siegert |
2023-02-21 |
| 11572271 |
Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer |
Sophie Guillemin, Joerg Siegert, Karl Tuttner |
2023-02-07 |
| 11248976 |
Capacitive pressure sensors and other devices having a suspended membrane and having rounded corners at an anchor edge |
Willem Frederik Adrianus Besling, Casper van der Avoort, Remco Henricus Wilhelmus Pijnenburg, Olaf Wunnicke, Jörg Siegert |
2022-02-15 |
| 8439280 |
Nebulizing device for liquid substances |
Fabio Marchetti, Stefano Deflorian, Gianluca Paolazzi |
2013-05-14 |