| 12100644 |
Semiconductor device with through-substrate via and method of manufacturing a semiconductor device with through-substrate via |
Bernhard Loeffler, Thomas Bodner |
2024-09-24 |
| 11697201 |
Exoskeleton system, control device, and method |
Urs Schneider |
2023-07-11 |
| 11572271 |
Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer |
Alessandro Faes, Sophie Guillemin, Karl Tuttner |
2023-02-07 |
| 11313749 |
Pressure sensor device and method for forming a pressure sensor device |
Willem Frederik Adrianus Besling, Coenraad Cornelis Tak, Martin Schrems, Franz Schrank |
2022-04-26 |
| 11271134 |
Method for manufacturing an optical sensor and optical sensor |
Gregor Toschkoff, Thomas Bodner, Franz Schrank, Miklos Labodi, Martin Schrems |
2022-03-08 |
| 11107848 |
Semiconductor device for detection of radiation and method of producing a semiconductor device for detection of radiation |
Hubert Enichlmair, Franz Schrank |
2021-08-31 |
| 10684412 |
Semiconductor device with photonic and electronic functionality and method for manufacturing a semiconductor device |
Jochen Kraft |
2020-06-16 |
| 10644047 |
Optoelectronic device with a refractive element and a method of producing such an optoelectronic device |
Jens Hofrichter, Franz Schrank |
2020-05-05 |
| 10332931 |
Semiconductor device for wafer-scale integration |
Cathal Cassidy, Franz Schrank |
2019-06-25 |
| 10283541 |
Semiconductor device comprising an aperture array and method of producing such a semiconductor device |
Franz Schrank, Martin Schrems |
2019-05-07 |
| 9991177 |
Method and arrangement for analyzing a semiconductor element and method for manufacturing a semiconductor component |
Helene Gehles, Thomas Bodner |
2018-06-05 |
| 9929035 |
Method of producing a removable wafer connection and carrier for wafer support |
Thomas Bodner, Martin Schrems |
2018-03-27 |
| 9852955 |
Method and arrangement for analyzing a semiconductor element and method for manufacturing a semiconductor component |
Helene Gehles, Thomas Bodner |
2017-12-26 |
| 9753218 |
Semiconductor device with integrated mirror and method of producing a semiconductor device with integrated mirror |
Jochen Kraft, Ewald Stueckler |
2017-09-05 |
| 9608035 |
Method of wafer-scale integration of semiconductor devices and semiconductor device |
Cathal Cassidy, Franz Schrank |
2017-03-28 |