Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11878906 | Method for manufacturing an integrated MEMS transducer device and integrated MEMS transducer device | Kailash Vijayakumar, Remco Henricus Wilhelmus Pijnenburg, Willem Frederik Adrianus Besling, Jörg Siegert | 2024-01-23 |
| 11572271 | Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer | Alessandro Faes, Joerg Siegert, Karl Tuttner | 2023-02-07 |
| 11492251 | Method for manufacturing an integrated MEMS transducer device and integrated MEMS transducer device | Kailash Vijayakumar, Remco Henricus Wilhelmus Pijnenburg, Willem Frederik Adrianus Besling, Jörg Siegert | 2022-11-08 |