Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237840 | Detection, correction, and compensation of coupling effects of microelectromechanical system (MEMS) axes of a two-dimensional scanning structure | Norbert Druml, Franz Michael Darrer, Philipp Greiner | 2025-02-25 |
| 12196950 | Driving signal parameter variation for driving MEMS mirrors for synchronization control and tuning Lissajous scanning | Han Woong Yoo, David Brunner, Norbert Druml, Selma KARIC, Leonhard NIEDERMUELLER +2 more | 2025-01-14 |
| 11835710 | Method of mode coupling detection and damping and usage for electrostatic MEMS mirrors | David Brunner, Franz Michael Darrer, Georg Schitter, Richard SCHROEDTER, Han Woong Yoo | 2023-12-05 |
| 11703681 | MEMS devices comprising spring element and comb drive and associated production methods | Marten Oldsen | 2023-07-18 |
| 11493532 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Steffen Bieselt, Sebastian PREGL, Matthias Rose | 2022-11-08 |
| 11300778 | MEMS device with suspension structure and method of making a MEMS device | Franz Michael Darrer, Marcus Hennecke, Hendrikus Van Lierop | 2022-04-12 |
| 10852319 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Steffen Bieselt, Sebastian PREGL, Matthias Rose | 2020-12-01 |
| 10768410 | Detection of amplitude, regulation of amplitude and detection of direction of an oscillation of an oscillatory body | Christoph Steiner, Franz Michael Darrer, Marcus Hennecke, Hendrikus Van Lierop, Thomas Thurner | 2020-09-08 |