Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359994 | Semiconductor die with pressure and acceleration sensor elements | Dirk Meinhold | 2025-07-15 |
| 12332271 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2025-06-17 |
| 12043539 | Sensor system with a microelectromechanical sensor element and method for producing a sensor system | Dirk Meinhold, Claudia HENGST, Daniel Koehler, Erhard Landgraf, Sebastian PREGL | 2024-07-23 |
| 12002812 | Method of producing a semiconductor component and semiconductor component | Dirk Meinhold | 2024-06-04 |
| 11493532 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Stephan Gerhard Albert, Sebastian PREGL, Matthias Rose | 2022-11-08 |
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2022-08-23 |
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2021-08-03 |
| 10961116 | Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor | Dirk Meinhold, Erhard Landgraf | 2021-03-30 |
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann +4 more | 2020-12-22 |
| 10852319 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Stephan Gerhard Albert, Sebastian PREGL, Matthias Rose | 2020-12-01 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2020-06-16 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Heiko Froehlich, Thoralf Kautzsch, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2020-06-16 |
| 10580663 | Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure | Thoralf Kautzsch, Alessia Scire | 2020-03-03 |
| 10544037 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2020-01-28 |
| 10539587 | Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies | Thoralf Kautzsch | 2020-01-21 |
| 10354911 | Silicon on nothing devices and methods of formation thereof | Thoralf Kautzsch, Alessia Scire | 2019-07-16 |
| 10290805 | Emitter and method for manufacturing the same | Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt | 2019-05-14 |
| 10170497 | Method for manufacturing an electronic device and method for operating an electronic device | Thoralf Kautzsch, Alessia Scire, Franz Hirler, Anton Mauder, Wolfgang Scholz +2 more | 2019-01-01 |
| 10096511 | Carrier and a method for processing a carrier | — | 2018-10-09 |
| 9991340 | Mechanical stress-decoupling in semiconductor device | Dirk Meinhold | 2018-06-05 |
| 9938133 | System and method for a comb-drive MEMS device | Thoralf Kautzsch, Mohsin Nawaz, Alfons Dehe, Heiko Froehlich, Alessia Scire | 2018-04-10 |
| 9938135 | Stress decoupled piezoresistive relative pressure sensor and method for manufacturing the same | — | 2018-04-10 |
| 9929181 | Method for manufacturing an electronic device and method for operating an electronic device | Thoralf Kautzsch, Alessia Scire, Franz Hirler, Anton Mauder, Wolfgang Scholz +2 more | 2018-03-27 |
| 9896329 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2018-02-20 |
| 9887355 | Emitter and method for manufacturing the same | Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt | 2018-02-06 |